Integrated Magnetic MEMS Relays: Status of the Technology
The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared t...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2014-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/5/3/622 |
| _version_ | 1828475649028784128 |
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| author | Giuseppe Schiavone Marc P. Y. Desmulliez Anthony J. Walton |
| author_facet | Giuseppe Schiavone Marc P. Y. Desmulliez Anthony J. Walton |
| author_sort | Giuseppe Schiavone |
| collection | DOAJ |
| description | The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes. |
| first_indexed | 2024-12-11T06:17:18Z |
| format | Article |
| id | doaj.art-1bbd51f5a50e41149d5f675f2e1944f6 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-11T06:17:18Z |
| publishDate | 2014-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-1bbd51f5a50e41149d5f675f2e1944f62022-12-22T01:17:57ZengMDPI AGMicromachines2072-666X2014-08-015362265310.3390/mi5030622mi5030622Integrated Magnetic MEMS Relays: Status of the TechnologyGiuseppe Schiavone0Marc P. Y. Desmulliez1Anthony J. Walton2Scottish Microelectronics Centre, Institute for Integrated Micro and Nano Systems, School of Engineering, The University of Edinburgh, King's Buildings, Edinburgh EH9 3JF, UKResearch Institute of Signals, Sensors and Systems, School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UKScottish Microelectronics Centre, Institute for Integrated Micro and Nano Systems, School of Engineering, The University of Edinburgh, King's Buildings, Edinburgh EH9 3JF, UKThe development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.http://www.mdpi.com/2072-666X/5/3/622magnetic MEMS (microelectromechanical systems)relaysMEMS integrationMEMS switchesmicroactuatorsRF-MEMS (radio frequency MEMS) |
| spellingShingle | Giuseppe Schiavone Marc P. Y. Desmulliez Anthony J. Walton Integrated Magnetic MEMS Relays: Status of the Technology Micromachines magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS) |
| title | Integrated Magnetic MEMS Relays: Status of the Technology |
| title_full | Integrated Magnetic MEMS Relays: Status of the Technology |
| title_fullStr | Integrated Magnetic MEMS Relays: Status of the Technology |
| title_full_unstemmed | Integrated Magnetic MEMS Relays: Status of the Technology |
| title_short | Integrated Magnetic MEMS Relays: Status of the Technology |
| title_sort | integrated magnetic mems relays status of the technology |
| topic | magnetic MEMS (microelectromechanical systems) relays MEMS integration MEMS switches microactuators RF-MEMS (radio frequency MEMS) |
| url | http://www.mdpi.com/2072-666X/5/3/622 |
| work_keys_str_mv | AT giuseppeschiavone integratedmagneticmemsrelaysstatusofthetechnology AT marcpydesmulliez integratedmagneticmemsrelaysstatusofthetechnology AT anthonyjwalton integratedmagneticmemsrelaysstatusofthetechnology |