| Summary: | Monolayer Cu2S and ZnO, and three kinds of complex films, Cu2S/ZnO, ZnO/Cu2S, and ZnO/Cu2S/ZnO, were deposited on glass substrates by means of radio frequency (RF) magnetron sputtering device. The impact of the thickness of ZnO and Cu2S on the whole transmittance, conductivity, and photocatalysis was investigated. The optical and electrical properties of the multilayer were studied by optical spectrometry and four point probes. Numerical simulation of the optical transmittance of the multilayer films has been carried out in order to guide the experimental work. The comprehensive performances of the multilayers as transparent conductive coatings were compared using the figure of merit. Compared with monolithic Cu2S and ZnO films, both the optical transmission property and photocatalytic performance of complex films such as Cu2S/ZnO and ZnO/Cu2S/ZnO change significantly.
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