Metrological studies of the characteristics of multilayer surface coatings using synchrotron radiation
The investigations of multilayer surface nanostructures characteristics was performed with synchrotron radiation sources, characterized by an intensive, calculated continuum. It plays an important role in nanoelectronics metrological base. The main research were carried out at electron storage rings...
| Автори: | , , , , |
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| Формат: | Стаття |
| Мова: | Russian |
| Опубліковано: |
MIREA - Russian Technological University
2021-03-01
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| Серія: | Российский технологический журнал |
| Предмети: | |
| Онлайн доступ: | https://www.rtj-mirea.ru/jour/article/view/275 |