Effect of negative bias voltage on preparation of diamond-like carbon films with high interfacial strength
In order to solve the problem of interfacial bonding strength and thick film between diamond-like carbon(DLC) film and metal substrate, a new process using a-Si: C: H bonding layer and H-DLC transition layer was proposed. The composite DLC films under different negative bias voltage conditions were...
Hoofdauteurs: | , , , |
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Formaat: | Artikel |
Taal: | zho |
Gepubliceerd in: |
Journal of Materials Engineering
2023-10-01
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Reeks: | Cailiao gongcheng |
Onderwerpen: | |
Online toegang: | http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2022.001081 |