Effect of negative bias voltage on preparation of diamond-like carbon films with high interfacial strength

In order to solve the problem of interfacial bonding strength and thick film between diamond-like carbon(DLC) film and metal substrate, a new process using a-Si: C: H bonding layer and H-DLC transition layer was proposed. The composite DLC films under different negative bias voltage conditions were...

Volledige beschrijving

Bibliografische gegevens
Hoofdauteurs: ZHENG Jinhua, LI Zhixiong, LIU Qingyun, MEI Shiyang
Formaat: Artikel
Taal:zho
Gepubliceerd in: Journal of Materials Engineering 2023-10-01
Reeks:Cailiao gongcheng
Onderwerpen:
Online toegang:http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2022.001081