Effect of negative bias voltage on preparation of diamond-like carbon films with high interfacial strength

Effect of negative bias voltage on preparation of diamond-like carbon films with high interfacial strength

In order to solve the problem of interfacial bonding strength and thick film between diamond-like carbon(DLC) film and metal substrate, a new process using a-Si: C: H bonding layer and H-DLC transition layer was proposed. The composite DLC films under different negative bias voltage conditions were...

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Bibliographic Details
Main Authors: ZHENG Jinhua, LI Zhixiong, LIU Qingyun, MEI Shiyang
Format: Article
Language:zho
Published: Journal of Materials Engineering 2023-10-01
Series:Cailiao gongcheng
Subjects:
h-dlc
interfacial strength
dc-pecvd
negative bias voltage
friction and wear
Online Access:http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2022.001081

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