MULTISENSOR MICROSYSTEM FOR MEASURING THE CONCENTRATION OF GASES CO, H2 , C3 H8 , CO2
Manufacture of module of chemical sensors on a single chip is one of the promising directions in the development of gas sensory. The aim of this work was development of construction of multisensor microsystem enabled to retain the characteristics of a single sensor and its dimensions and, at the sam...
| Main Authors: | , , |
|---|---|
| 格式: | 文件 |
| 语言: | English |
| 出版: |
Belarusian National Technical University
2016-12-01
|
| 丛编: | Приборы и методы измерений |
| 主题: | |
| 在线阅读: | https://pimi.bntu.by/jour/article/view/270 |