Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-07-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0055444 |
| _version_ | 1829514044221947904 |
|---|---|
| author | R. U. Masheyeva K. N. Dzhumagulova M. Myrzaly J. Schulze Z. Donkó |
| author_facet | R. U. Masheyeva K. N. Dzhumagulova M. Myrzaly J. Schulze Z. Donkó |
| author_sort | R. U. Masheyeva |
| collection | DOAJ |
| description | In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary the coefficients that characterize the elastic reflection of electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to slightly affect the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics. |
| first_indexed | 2024-12-16T13:11:05Z |
| format | Article |
| id | doaj.art-1d241530540449daac36a08476f0a7ba |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-16T13:11:05Z |
| publishDate | 2021-07-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-1d241530540449daac36a08476f0a7ba2022-12-21T22:30:36ZengAIP Publishing LLCAIP Advances2158-32262021-07-01117075024075024-1310.1063/5.0055444Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmasR. U. Masheyeva0K. N. Dzhumagulova1M. Myrzaly2J. Schulze3Z. Donkó4IETP, Al-Farabi Kazakh National University, 71 Al-Farabi Ave., Almaty 050040, KazakhstanIETP, Al-Farabi Kazakh National University, 71 Al-Farabi Ave., Almaty 050040, KazakhstanIETP, Al-Farabi Kazakh National University, 71 Al-Farabi Ave., Almaty 050040, KazakhstanDepartment of Electrical Engineering and Information Science, Ruhr-University Bochum, D-44780 Bochum, Germany and Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, School of Physics, Dalian University of Technology, Dalian, ChinaWigner Research Centre for Physics, H1121 Budapest, HungaryIn this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary the coefficients that characterize the elastic reflection of electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to slightly affect the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics.http://dx.doi.org/10.1063/5.0055444 |
| spellingShingle | R. U. Masheyeva K. N. Dzhumagulova M. Myrzaly J. Schulze Z. Donkó Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas AIP Advances |
| title | Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas |
| title_full | Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas |
| title_fullStr | Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas |
| title_full_unstemmed | Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas |
| title_short | Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas |
| title_sort | self bias voltage formation and charged particle dynamics in multi frequency capacitively coupled plasmas |
| url | http://dx.doi.org/10.1063/5.0055444 |
| work_keys_str_mv | AT rumasheyeva selfbiasvoltageformationandchargedparticledynamicsinmultifrequencycapacitivelycoupledplasmas AT kndzhumagulova selfbiasvoltageformationandchargedparticledynamicsinmultifrequencycapacitivelycoupledplasmas AT mmyrzaly selfbiasvoltageformationandchargedparticledynamicsinmultifrequencycapacitivelycoupledplasmas AT jschulze selfbiasvoltageformationandchargedparticledynamicsinmultifrequencycapacitivelycoupledplasmas AT zdonko selfbiasvoltageformationandchargedparticledynamicsinmultifrequencycapacitivelycoupledplasmas |