Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO<sub>3</sub> depositadas por el método “Spin Coating”

Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO<sub>3</sub> depositadas por el método “Spin Coating”

Lithium niobate (LiNbO3) thin films with 1/1 stoichiometry were prepared by a spin-coating from polymeric precursor method. The films deposited on silicon (100) substrates, were thermally treated from 400° to 600°C for 3 hours in order to study the influence of thermal treatment on the crystallinity...

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Dades bibliogràfiques
Autors principals:	Zaghete, M. A., Cilense, M., Cavalheiro, A. A., Giménez, R., González, A. H. M., Varela, J. A., Zirpoli, A., Stojanovic, B.
Format:	Article
Idioma:	English
Publicat:	Elsevier 2001-08-01
Col·lecció:	Boletín de la Sociedad Española de Cerámica y Vidrio
Matèries:	Thin Films LiNbO3 Spin-coating Thermal Treatment Películas delgadas Tratamiento Térmico
Accés en línia:	http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/736/764

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