Prototype Optical Bionic Microphone with a Dual-Channel Mach–Zehnder Interferometric Transducer

Prototype Optical Bionic Microphone with a Dual-Channel Mach–Zehnder Interferometric Transducer

A prototype optical bionic microphone with a dual-channel Mach–Zehnder interferometric (MZI) transducer was designed and prepared for the first time using a silicon diaphragm made by microelectromechanical system (MEMS) technology. The MEMS diaphragm mimicked the structure of the fly Ormia Ochracea’...

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Bibliographic Details
Main Authors:	Xin Liu, Chen Cai, Kangning Ji, Xinyu Hu, Linsen Xiong, Zhi-mei Qi
Format:	Article
Language:	English
Published:	MDPI AG 2023-04-01
Series:	Sensors
Subjects:	optical directional microphone Mach–Zehnder interferometer bionic MEMS silicon diaphragm temperature robustness high sensitivity
Online Access:	https://www.mdpi.com/1424-8220/23/9/4416

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