A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern Interferometry
As a guide rail is the basic motion unit of precision equipment, the measurement of and compensation for its motion errors are important preconditions for precision machining and manufacturing. A targetless and simultaneous measurement method of three-degree-of-freedom (3-DOF) angular motion errors...
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| Format: | Article |
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MDPI AG
2023-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/23/7/3393 |
| _version_ | 1797607027482034176 |
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| author | Lili Shi Sijin Wu Miao Yan Haisha Niu |
| author_facet | Lili Shi Sijin Wu Miao Yan Haisha Niu |
| author_sort | Lili Shi |
| collection | DOAJ |
| description | As a guide rail is the basic motion unit of precision equipment, the measurement of and compensation for its motion errors are important preconditions for precision machining and manufacturing. A targetless and simultaneous measurement method of three-degree-of-freedom (3-DOF) angular motion errors using digital speckle pattern interferometry (DSPI) is introduced in this paper. Based on the analysis of the sensitivity mechanism of DSPI to DOF errors and the formation mechanism of the phase fringes, the relationship between the angular motion errors and the distribution of the interferometric phases was established, and a new simultaneous measurement model of 3-DOF angular motion errors was further proposed. An optical setup based on a three-dimensional spatial-carrier DSPI with a right-angle symmetrical layout was used in the measurement system. Furthermore, repetitive tests, noise tests, and precision analysis were carried out to verify the performance of the system. The test results showed that the measurement resolution of the system was <1 μrad, which is capable of measuring the pitch angle, yaw angle, and roll angle at the submicron arc level simultaneously without target mirrors. The method has the advantages of no need to install cooperative targets and high measurement resolution, showing broad application prospects in many fields, including mechanical manufacturing, laser detection, aerospace, etc. |
| first_indexed | 2024-03-11T05:25:30Z |
| format | Article |
| id | doaj.art-1d5da4bd71dd4c998db774bc5d144aa0 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T05:25:30Z |
| publishDate | 2023-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-1d5da4bd71dd4c998db774bc5d144aa02023-11-17T17:31:53ZengMDPI AGSensors1424-82202023-03-01237339310.3390/s23073393A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern InterferometryLili Shi0Sijin Wu1Miao Yan2Haisha Niu3School of Instrumentation Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaSchool of Instrumentation Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaSchool of Instrumentation Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaSchool of Instrumentation Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, ChinaAs a guide rail is the basic motion unit of precision equipment, the measurement of and compensation for its motion errors are important preconditions for precision machining and manufacturing. A targetless and simultaneous measurement method of three-degree-of-freedom (3-DOF) angular motion errors using digital speckle pattern interferometry (DSPI) is introduced in this paper. Based on the analysis of the sensitivity mechanism of DSPI to DOF errors and the formation mechanism of the phase fringes, the relationship between the angular motion errors and the distribution of the interferometric phases was established, and a new simultaneous measurement model of 3-DOF angular motion errors was further proposed. An optical setup based on a three-dimensional spatial-carrier DSPI with a right-angle symmetrical layout was used in the measurement system. Furthermore, repetitive tests, noise tests, and precision analysis were carried out to verify the performance of the system. The test results showed that the measurement resolution of the system was <1 μrad, which is capable of measuring the pitch angle, yaw angle, and roll angle at the submicron arc level simultaneously without target mirrors. The method has the advantages of no need to install cooperative targets and high measurement resolution, showing broad application prospects in many fields, including mechanical manufacturing, laser detection, aerospace, etc.https://www.mdpi.com/1424-8220/23/7/3393digital speckle pattern interferometrythree degrees of freedomangular motion errorspitchyawroll |
| spellingShingle | Lili Shi Sijin Wu Miao Yan Haisha Niu A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern Interferometry Sensors digital speckle pattern interferometry three degrees of freedom angular motion errors pitch yaw roll |
| title | A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern Interferometry |
| title_full | A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern Interferometry |
| title_fullStr | A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern Interferometry |
| title_full_unstemmed | A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern Interferometry |
| title_short | A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern Interferometry |
| title_sort | targetless method for simultaneously measuring three degree of freedom angular motion errors with digital speckle pattern interferometry |
| topic | digital speckle pattern interferometry three degrees of freedom angular motion errors pitch yaw roll |
| url | https://www.mdpi.com/1424-8220/23/7/3393 |
| work_keys_str_mv | AT lilishi atargetlessmethodforsimultaneouslymeasuringthreedegreeoffreedomangularmotionerrorswithdigitalspecklepatterninterferometry AT sijinwu atargetlessmethodforsimultaneouslymeasuringthreedegreeoffreedomangularmotionerrorswithdigitalspecklepatterninterferometry AT miaoyan atargetlessmethodforsimultaneouslymeasuringthreedegreeoffreedomangularmotionerrorswithdigitalspecklepatterninterferometry AT haishaniu atargetlessmethodforsimultaneouslymeasuringthreedegreeoffreedomangularmotionerrorswithdigitalspecklepatterninterferometry AT lilishi targetlessmethodforsimultaneouslymeasuringthreedegreeoffreedomangularmotionerrorswithdigitalspecklepatterninterferometry AT sijinwu targetlessmethodforsimultaneouslymeasuringthreedegreeoffreedomangularmotionerrorswithdigitalspecklepatterninterferometry AT miaoyan targetlessmethodforsimultaneouslymeasuringthreedegreeoffreedomangularmotionerrorswithdigitalspecklepatterninterferometry AT haishaniu targetlessmethodforsimultaneouslymeasuringthreedegreeoffreedomangularmotionerrorswithdigitalspecklepatterninterferometry |