Analysis of the Surface Microtexture of Sputtered Indium Tin Oxide Thin Films

Analysis of the Surface Microtexture of Sputtered Indium Tin Oxide Thin Films

The present research work involves the study of the 3-D surface microtexture of sputtered indium tin oxide (ITO) prepared on glass substrates by DC magnetron at room temperature. The samples were annealed at 450°C in air and were distributed into five groups, dependent on ambient combinations applie...

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Bibliographic Details
Main Authors:	Ş. Ţălu, S. Kulesza, M. Bramowicz, K. Stępień, D. Dastan
Format:	Article
Language:	English
Published:	Polish Academy of Sciences 2021-05-01
Series:	Archives of Metallurgy and Materials
Subjects:	afm dc magnetron sputtering ito thin films stereometric analysis 3-d surface microtexture
Online Access:	https://journals.pan.pl/Content/118799/PDF/AMM-2021-2-13-Stefan%20Talu.pdf

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