Bistable, Pneumatically Actuated Microgripper Fabricated Using Two‐Photon Polymerization and Oxygen Plasma Etching
Fabrication of actuatable micromechanisms onto the tip of submillimeter medical instruments permits microsurgery, cellular‐level intervention, targeted drug delivery, or placement of microimplants. In these systems, a common lack of integrated microsensors or optical feedback prohibits stabilizing c...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2023-04-01
|
| Series: | Advanced Intelligent Systems |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/aisy.202200121 |
| _version_ | 1827962807268671488 |
|---|---|
| author | Maura Power Antoine Barbot Florent Seichepine Guang-Zhong Yang |
| author_facet | Maura Power Antoine Barbot Florent Seichepine Guang-Zhong Yang |
| author_sort | Maura Power |
| collection | DOAJ |
| description | Fabrication of actuatable micromechanisms onto the tip of submillimeter medical instruments permits microsurgery, cellular‐level intervention, targeted drug delivery, or placement of microimplants. In these systems, a common lack of integrated microsensors or optical feedback prohibits stabilizing closed‐loop control. Moreover, the low stiffness of compact actuator and microfabrication limitations lead to difficult control. Herein, a compact bistable open‐loop micromechanism mounted on a small (170 μm) capillary fiber is developed. Bistabillity is utilized to control the mechanism to precise positions without the need for feedback or continuous control. Repeatable fabrication of this compact and high‐resolution bistable micromechanism is achieved with a two‐photon polymerization (2PP) process refined by oxygen plasma etching (OPE) that results in minimal feature size of a few hundred nanometers along the direction of the laser's axis, allowing 2PP bistable mechanisms to be fabricated in arbitrary orientations not restricted by printing direction. Finite element method simulations and experimental studies of the OPE effect are presented and used to optimize the micromechanism's bistable behavior. Finally, the feasibility of such compact bistable mechanism with a gripper that captures 50 μm spheres and passively maintains grasping without constant driving force even in long open‐close cycles is demonstrated. |
| first_indexed | 2024-04-09T16:48:43Z |
| format | Article |
| id | doaj.art-1dd0ddb039584282b18216a5086fec55 |
| institution | Directory Open Access Journal |
| issn | 2640-4567 |
| language | English |
| last_indexed | 2024-04-09T16:48:43Z |
| publishDate | 2023-04-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advanced Intelligent Systems |
| spelling | doaj.art-1dd0ddb039584282b18216a5086fec552023-04-22T02:52:33ZengWileyAdvanced Intelligent Systems2640-45672023-04-0154n/an/a10.1002/aisy.202200121Bistable, Pneumatically Actuated Microgripper Fabricated Using Two‐Photon Polymerization and Oxygen Plasma EtchingMaura Power0Antoine Barbot1Florent Seichepine2Guang-Zhong Yang3Hamlyn Centre Imperial College London SW7 2AZ London UKAS2M Femto-St 25000 Besançon FranceHamlyn Centre Imperial College London SW7 2AZ London UKInstitute of Medical Robotics Shanghai Jiao Tong University Shanghai ChinaFabrication of actuatable micromechanisms onto the tip of submillimeter medical instruments permits microsurgery, cellular‐level intervention, targeted drug delivery, or placement of microimplants. In these systems, a common lack of integrated microsensors or optical feedback prohibits stabilizing closed‐loop control. Moreover, the low stiffness of compact actuator and microfabrication limitations lead to difficult control. Herein, a compact bistable open‐loop micromechanism mounted on a small (170 μm) capillary fiber is developed. Bistabillity is utilized to control the mechanism to precise positions without the need for feedback or continuous control. Repeatable fabrication of this compact and high‐resolution bistable micromechanism is achieved with a two‐photon polymerization (2PP) process refined by oxygen plasma etching (OPE) that results in minimal feature size of a few hundred nanometers along the direction of the laser's axis, allowing 2PP bistable mechanisms to be fabricated in arbitrary orientations not restricted by printing direction. Finite element method simulations and experimental studies of the OPE effect are presented and used to optimize the micromechanism's bistable behavior. Finally, the feasibility of such compact bistable mechanism with a gripper that captures 50 μm spheres and passively maintains grasping without constant driving force even in long open‐close cycles is demonstrated.https://doi.org/10.1002/aisy.202200121bistable mechanismcompliant mechanismmicrogripperpneumatic actuationtwo-photon polymerisation |
| spellingShingle | Maura Power Antoine Barbot Florent Seichepine Guang-Zhong Yang Bistable, Pneumatically Actuated Microgripper Fabricated Using Two‐Photon Polymerization and Oxygen Plasma Etching Advanced Intelligent Systems bistable mechanism compliant mechanism microgripper pneumatic actuation two-photon polymerisation |
| title | Bistable, Pneumatically Actuated Microgripper Fabricated Using Two‐Photon Polymerization and Oxygen Plasma Etching |
| title_full | Bistable, Pneumatically Actuated Microgripper Fabricated Using Two‐Photon Polymerization and Oxygen Plasma Etching |
| title_fullStr | Bistable, Pneumatically Actuated Microgripper Fabricated Using Two‐Photon Polymerization and Oxygen Plasma Etching |
| title_full_unstemmed | Bistable, Pneumatically Actuated Microgripper Fabricated Using Two‐Photon Polymerization and Oxygen Plasma Etching |
| title_short | Bistable, Pneumatically Actuated Microgripper Fabricated Using Two‐Photon Polymerization and Oxygen Plasma Etching |
| title_sort | bistable pneumatically actuated microgripper fabricated using two photon polymerization and oxygen plasma etching |
| topic | bistable mechanism compliant mechanism microgripper pneumatic actuation two-photon polymerisation |
| url | https://doi.org/10.1002/aisy.202200121 |
| work_keys_str_mv | AT maurapower bistablepneumaticallyactuatedmicrogripperfabricatedusingtwophotonpolymerizationandoxygenplasmaetching AT antoinebarbot bistablepneumaticallyactuatedmicrogripperfabricatedusingtwophotonpolymerizationandoxygenplasmaetching AT florentseichepine bistablepneumaticallyactuatedmicrogripperfabricatedusingtwophotonpolymerizationandoxygenplasmaetching AT guangzhongyang bistablepneumaticallyactuatedmicrogripperfabricatedusingtwophotonpolymerizationandoxygenplasmaetching |