Design and Analyses of a MEMS Based Resonant Magnetometer
A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2009-09-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/9/9/6951/ |
| _version_ | 1817991757471678464 |
|---|---|
| author | Dahai Ren Lingqi Wu Meizhi Yan Mingyang Cui Zheng You Muzhi Hu |
| author_facet | Dahai Ren Lingqi Wu Meizhi Yan Mingyang Cui Zheng You Muzhi Hu |
| author_sort | Dahai Ren |
| collection | DOAJ |
| description | A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the air damping effect is estimated. The test results of the prototype are in accordance with the simulation results of the designed model. The resolution of the magnetometer can reach 30 nT. The test results indicate its sensitivity of more than 400 mV/μT when operating in a 10 Pa vacuum environment. |
| first_indexed | 2024-04-14T01:17:37Z |
| format | Article |
| id | doaj.art-1e377719d3834f2f8112cc16321c6b74 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-14T01:17:37Z |
| publishDate | 2009-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-1e377719d3834f2f8112cc16321c6b742022-12-22T02:20:48ZengMDPI AGSensors1424-82202009-09-01996951696610.3390/s90906951Design and Analyses of a MEMS Based Resonant MagnetometerDahai RenLingqi WuMeizhi YanMingyang CuiZheng YouMuzhi HuA novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the air damping effect is estimated. The test results of the prototype are in accordance with the simulation results of the designed model. The resolution of the magnetometer can reach 30 nT. The test results indicate its sensitivity of more than 400 mV/μT when operating in a 10 Pa vacuum environment.http://www.mdpi.com/1424-8220/9/9/6951/magnetometerMEMScapacitanceLorentz forcesimulation |
| spellingShingle | Dahai Ren Lingqi Wu Meizhi Yan Mingyang Cui Zheng You Muzhi Hu Design and Analyses of a MEMS Based Resonant Magnetometer Sensors magnetometer MEMS capacitance Lorentz force simulation |
| title | Design and Analyses of a MEMS Based Resonant Magnetometer |
| title_full | Design and Analyses of a MEMS Based Resonant Magnetometer |
| title_fullStr | Design and Analyses of a MEMS Based Resonant Magnetometer |
| title_full_unstemmed | Design and Analyses of a MEMS Based Resonant Magnetometer |
| title_short | Design and Analyses of a MEMS Based Resonant Magnetometer |
| title_sort | design and analyses of a mems based resonant magnetometer |
| topic | magnetometer MEMS capacitance Lorentz force simulation |
| url | http://www.mdpi.com/1424-8220/9/9/6951/ |
| work_keys_str_mv | AT dahairen designandanalysesofamemsbasedresonantmagnetometer AT lingqiwu designandanalysesofamemsbasedresonantmagnetometer AT meizhiyan designandanalysesofamemsbasedresonantmagnetometer AT mingyangcui designandanalysesofamemsbasedresonantmagnetometer AT zhengyou designandanalysesofamemsbasedresonantmagnetometer AT muzhihu designandanalysesofamemsbasedresonantmagnetometer |