Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid
Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated M...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-05-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/6/645 |
| _version_ | 1827690902350462976 |
|---|---|
| author | Hao Jia Pengcheng Xu Xinxin Li |
| author_facet | Hao Jia Pengcheng Xu Xinxin Li |
| author_sort | Hao Jia |
| collection | DOAJ |
| description | Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (<i>Q</i>) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms. |
| first_indexed | 2024-03-10T10:49:29Z |
| format | Article |
| id | doaj.art-1e6291db15f74bf6b5acfdff4a3e913b |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T10:49:29Z |
| publishDate | 2021-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-1e6291db15f74bf6b5acfdff4a3e913b2023-11-21T22:18:46ZengMDPI AGMicromachines2072-666X2021-05-0112664510.3390/mi12060645Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and LiquidHao Jia0Pengcheng Xu1Xinxin Li2State Key Lab of Transducer Technology, Shanghai Institute of Microsystem & Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, ChinaState Key Lab of Transducer Technology, Shanghai Institute of Microsystem & Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, ChinaState Key Lab of Transducer Technology, Shanghai Institute of Microsystem & Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, ChinaResonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (<i>Q</i>) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.https://www.mdpi.com/2072-666X/12/6/645integrated resonatorsgravimetric sensorsbio/chemical sensingquality factorresonant modes |
| spellingShingle | Hao Jia Pengcheng Xu Xinxin Li Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid Micromachines integrated resonators gravimetric sensors bio/chemical sensing quality factor resonant modes |
| title | Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid |
| title_full | Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid |
| title_fullStr | Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid |
| title_full_unstemmed | Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid |
| title_short | Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid |
| title_sort | integrated resonant micro nano gravimetric sensors for bio chemical detection in air and liquid |
| topic | integrated resonators gravimetric sensors bio/chemical sensing quality factor resonant modes |
| url | https://www.mdpi.com/2072-666X/12/6/645 |
| work_keys_str_mv | AT haojia integratedresonantmicronanogravimetricsensorsforbiochemicaldetectioninairandliquid AT pengchengxu integratedresonantmicronanogravimetricsensorsforbiochemicaldetectioninairandliquid AT xinxinli integratedresonantmicronanogravimetricsensorsforbiochemicaldetectioninairandliquid |