Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics

An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling re...

Full description

Bibliographic Details
Main Authors: Haipeng Liu, Jijun Feng, Jinman Ge, Shanqing Zhuang, Shuo Yuan, Yishu Chen, Xiaojun Li, Qinggui Tan, Qinghua Yu, Heping Zeng
Format: Article
Language:English
Published: MDPI AG 2021-10-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/10/2645
_version_ 1797513602133917696
author Haipeng Liu
Jijun Feng
Jinman Ge
Shanqing Zhuang
Shuo Yuan
Yishu Chen
Xiaojun Li
Qinggui Tan
Qinghua Yu
Heping Zeng
author_facet Haipeng Liu
Jijun Feng
Jinman Ge
Shanqing Zhuang
Shuo Yuan
Yishu Chen
Xiaojun Li
Qinggui Tan
Qinghua Yu
Heping Zeng
author_sort Haipeng Liu
collection DOAJ
description An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 μm, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.
first_indexed 2024-03-10T06:18:53Z
format Article
id doaj.art-1ec15a3d3aaa447abc93721fc7569b20
institution Directory Open Access Journal
issn 2079-4991
language English
last_indexed 2024-03-10T06:18:53Z
publishDate 2021-10-01
publisher MDPI AG
record_format Article
series Nanomaterials
spelling doaj.art-1ec15a3d3aaa447abc93721fc7569b202023-11-22T19:24:28ZengMDPI AGNanomaterials2079-49912021-10-011110264510.3390/nano11102645Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon PhotonicsHaipeng Liu0Jijun Feng1Jinman Ge2Shanqing Zhuang3Shuo Yuan4Yishu Chen5Xiaojun Li6Qinggui Tan7Qinghua Yu8Heping Zeng9Shanghai Key Laboratory of Modern Optical System, Engineering Research Center of Optical Instrument and System, Ministry of Education, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, ChinaShanghai Key Laboratory of Modern Optical System, Engineering Research Center of Optical Instrument and System, Ministry of Education, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, ChinaNational Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology, Xi’an 710100, ChinaShanghai Key Laboratory of Modern Optical System, Engineering Research Center of Optical Instrument and System, Ministry of Education, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, ChinaShanghai Key Laboratory of Modern Optical System, Engineering Research Center of Optical Instrument and System, Ministry of Education, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, ChinaShanghai Key Laboratory of Modern Optical System, Engineering Research Center of Optical Instrument and System, Ministry of Education, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, ChinaNational Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology, Xi’an 710100, ChinaNational Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology, Xi’an 710100, ChinaKey Laboratory of Intelligent Infrared Perception, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, ChinaChongqing Key Laboratory of Precision Optics, Chongqing Institute of East China Normal University, Chongqing 401120, ChinaAn ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 μm, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.https://www.mdpi.com/2079-4991/11/10/2645nano-gratingpolarizing beam splittersilicon photonicsintegrated photonics
spellingShingle Haipeng Liu
Jijun Feng
Jinman Ge
Shanqing Zhuang
Shuo Yuan
Yishu Chen
Xiaojun Li
Qinggui Tan
Qinghua Yu
Heping Zeng
Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics
Nanomaterials
nano-grating
polarizing beam splitter
silicon photonics
integrated photonics
title Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics
title_full Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics
title_fullStr Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics
title_full_unstemmed Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics
title_short Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics
title_sort tilted nano grating based ultra compact broadband polarizing beam splitter for silicon photonics
topic nano-grating
polarizing beam splitter
silicon photonics
integrated photonics
url https://www.mdpi.com/2079-4991/11/10/2645
work_keys_str_mv AT haipengliu tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT jijunfeng tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT jinmange tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT shanqingzhuang tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT shuoyuan tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT yishuchen tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT xiaojunli tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT qingguitan tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT qinghuayu tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics
AT hepingzeng tiltednanogratingbasedultracompactbroadbandpolarizingbeamsplitterforsiliconphotonics