Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing

Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing

A focused ion beam scanning electron microscope (FIB-SEM) is a powerful tool that is routinely used for scale imaging from the micro- to nanometer scales, micromachining, prototyping, and metrology. In spite of the significant capabilities of a FIB-SEM, there are inherent artefacts (e.g., structural...

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Bibliographic Details
Main Authors: Kritika Singh, Surya Snata Rout, Christina Krywka, Anton Davydok
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Materials
Subjects:
focused ion beam milling
TiAl
magnesium
synchrotron
nanodiffraction
X-ray fluorescence
Online Access:https://www.mdpi.com/1996-1944/16/22/7220

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