Measurement of Nanometre-Scale Gate Oxide Thicknesses by Energy-Dispersive X-ray Spectroscopy in a Scanning Electron Microscope Combined with Monte Carlo Simulations
A procedure based on energy-dispersive X-ray spectroscopy in a scanning electron microscope (SEM-EDXS) is proposed to measure ultra-thin oxide layer thicknesses to atomic scale precision in top-down instead of cross-sectional geometry. The approach is based on modelling the variation of the electron...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-08-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/11/8/2117 |