Two dimensional semiconducting materials for ultimately scaled transistors

Summary: Two dimensional (2D) semiconductors have been established as promising candidates to break through the short channel effect that existed in Si metal-oxide-semiconductor field-effect-transistor (MOSFET), owing to their unique atomically layered structure and dangling-bond-free surface. The l...

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Main Authors: Tianyao Wei, Zichao Han, Xinyi Zhong, Qingyu Xiao, Tao Liu, Du Xiang
Format: Article
Language:English
Published: Elsevier 2022-10-01
Series:iScience
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2589004222014328
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author Tianyao Wei
Zichao Han
Xinyi Zhong
Qingyu Xiao
Tao Liu
Du Xiang
author_facet Tianyao Wei
Zichao Han
Xinyi Zhong
Qingyu Xiao
Tao Liu
Du Xiang
author_sort Tianyao Wei
collection DOAJ
description Summary: Two dimensional (2D) semiconductors have been established as promising candidates to break through the short channel effect that existed in Si metal-oxide-semiconductor field-effect-transistor (MOSFET), owing to their unique atomically layered structure and dangling-bond-free surface. The last decade has witnessed the significant progress in the size scaling of 2D transistors by various approaches, in which the physical gate length of the transistors has shrank from micrometer to sub-one nanometer with superior performance, illustrating their potential as a replacement technology for Si MOSFETs. Here, we review state-of-the-art techniques to achieve ultra-scaled 2D transistors with novel configurations through the scaling of channel, gate, and contact length. We provide comprehensive views of the merits and drawbacks of the ultra-scaled 2D transistors by summarizing the relevant fabrication processes with the corresponding critical parameters achieved. Finally, we identify the key opportunities and challenges for integrating ultra-scaled 2D transistors in the next-generation heterogeneous circuitry.
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spelling doaj.art-1fe4ca942b5c4c86b6c2817984f3ebf12022-12-22T03:49:07ZengElsevieriScience2589-00422022-10-012510105160Two dimensional semiconducting materials for ultimately scaled transistorsTianyao Wei0Zichao Han1Xinyi Zhong2Qingyu Xiao3Tao Liu4Du Xiang5Institute of Optoelectronics, Fudan University, Shanghai 200438, People’s Republic of China; Frontier Institute of Chip and System, Fudan University, Shanghai 200438, People’s Republic of ChinaInstitute of Optoelectronics, Fudan University, Shanghai 200438, People’s Republic of ChinaDepartment of Materials Science, Fudan University, Shanghai 200433, People’s Republic of ChinaDepartment of Materials Science, Fudan University, Shanghai 200433, People’s Republic of ChinaInstitute of Optoelectronics, Fudan University, Shanghai 200438, People’s Republic of China; Zhangjiang Fudan International Innovation Centre, Fudan University, Shanghai 200438, People’s Republic of China; Corresponding authorFrontier Institute of Chip and System, Fudan University, Shanghai 200438, People’s Republic of China; Zhangjiang Fudan International Innovation Centre, Fudan University, Shanghai 200438, People’s Republic of China; Shanghai Qi Zhi Institute, Shanghai 200232, People’s Republic of China; Corresponding authorSummary: Two dimensional (2D) semiconductors have been established as promising candidates to break through the short channel effect that existed in Si metal-oxide-semiconductor field-effect-transistor (MOSFET), owing to their unique atomically layered structure and dangling-bond-free surface. The last decade has witnessed the significant progress in the size scaling of 2D transistors by various approaches, in which the physical gate length of the transistors has shrank from micrometer to sub-one nanometer with superior performance, illustrating their potential as a replacement technology for Si MOSFETs. Here, we review state-of-the-art techniques to achieve ultra-scaled 2D transistors with novel configurations through the scaling of channel, gate, and contact length. We provide comprehensive views of the merits and drawbacks of the ultra-scaled 2D transistors by summarizing the relevant fabrication processes with the corresponding critical parameters achieved. Finally, we identify the key opportunities and challenges for integrating ultra-scaled 2D transistors in the next-generation heterogeneous circuitry.http://www.sciencedirect.com/science/article/pii/S2589004222014328Electrical engineeringNanomaterialsDevices
spellingShingle Tianyao Wei
Zichao Han
Xinyi Zhong
Qingyu Xiao
Tao Liu
Du Xiang
Two dimensional semiconducting materials for ultimately scaled transistors
iScience
Electrical engineering
Nanomaterials
Devices
title Two dimensional semiconducting materials for ultimately scaled transistors
title_full Two dimensional semiconducting materials for ultimately scaled transistors
title_fullStr Two dimensional semiconducting materials for ultimately scaled transistors
title_full_unstemmed Two dimensional semiconducting materials for ultimately scaled transistors
title_short Two dimensional semiconducting materials for ultimately scaled transistors
title_sort two dimensional semiconducting materials for ultimately scaled transistors
topic Electrical engineering
Nanomaterials
Devices
url http://www.sciencedirect.com/science/article/pii/S2589004222014328
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AT xinyizhong twodimensionalsemiconductingmaterialsforultimatelyscaledtransistors
AT qingyuxiao twodimensionalsemiconductingmaterialsforultimatelyscaledtransistors
AT taoliu twodimensionalsemiconductingmaterialsforultimatelyscaledtransistors
AT duxiang twodimensionalsemiconductingmaterialsforultimatelyscaledtransistors