Humidity Sensor Based on rGO-SDS Composite Film

Based on the humidity testing requirements in different environments, this paper investigates the humidity sensitivity of reduced graphene oxide (rGO)-sodium dodecyl sulfate (SDS) composite film humidity sensor. In the experiments, rGO-SDS dispersions with a concentration of 5 mg/mL were prepared, a...

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Main Authors: Cheng Lei, Junna Zhang, Ting Liang, Ruifang Liu, Zhujie Zhao, Jijun Xiong, Kai Yin
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/4/504
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author Cheng Lei
Junna Zhang
Ting Liang
Ruifang Liu
Zhujie Zhao
Jijun Xiong
Kai Yin
author_facet Cheng Lei
Junna Zhang
Ting Liang
Ruifang Liu
Zhujie Zhao
Jijun Xiong
Kai Yin
author_sort Cheng Lei
collection DOAJ
description Based on the humidity testing requirements in different environments, this paper investigates the humidity sensitivity of reduced graphene oxide (rGO)-sodium dodecyl sulfate (SDS) composite film humidity sensor. In the experiments, rGO-SDS dispersions with a concentration of 5 mg/mL were prepared, and a microelectromechanical system (MEMS) process was used to prepare the interdigital electrodes. The dispersions were then drop-coated on the interdigital electrodes and dried on a heated plate at 100 °C. The surface characteristics of the rGO-SDS films transferred onto SiO<sub>2</sub>-Si substrates were analyzed by scanning electron microscopy, raman spectroscopy and atomic force microscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, and tested by a correlation system, which showed a linear relationship between humidity variation and the resistance variation of the sensor in the ambient humidity range of 25–95% RH. At room temperature, the linearity of the sensor is about 0.98431 and the sensitivity is about 11.41432 Ω/% RH. At 100 °C, the correlation of the sensor is about 0.95046 and the sensitivity is about 1.0145 Ω/% RH; with a response time of only 9 s at ambient humidity from 25% RH to 95% RH, the sensor has very good repeatability and stability.
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spelling doaj.art-2009e47c2e0c42c4b37b9f9685e1a5972023-12-01T21:14:21ZengMDPI AGMicromachines2072-666X2022-03-0113450410.3390/mi13040504Humidity Sensor Based on rGO-SDS Composite FilmCheng Lei0Junna Zhang1Ting Liang2Ruifang Liu3Zhujie Zhao4Jijun Xiong5Kai Yin6State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Bioelectronics, Southeast University, Nanjing 210096, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, ChinaDepartment of Energy Technology, Aalborg University, 9220 Aalborg, DenmarkBased on the humidity testing requirements in different environments, this paper investigates the humidity sensitivity of reduced graphene oxide (rGO)-sodium dodecyl sulfate (SDS) composite film humidity sensor. In the experiments, rGO-SDS dispersions with a concentration of 5 mg/mL were prepared, and a microelectromechanical system (MEMS) process was used to prepare the interdigital electrodes. The dispersions were then drop-coated on the interdigital electrodes and dried on a heated plate at 100 °C. The surface characteristics of the rGO-SDS films transferred onto SiO<sub>2</sub>-Si substrates were analyzed by scanning electron microscopy, raman spectroscopy and atomic force microscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, and tested by a correlation system, which showed a linear relationship between humidity variation and the resistance variation of the sensor in the ambient humidity range of 25–95% RH. At room temperature, the linearity of the sensor is about 0.98431 and the sensitivity is about 11.41432 Ω/% RH. At 100 °C, the correlation of the sensor is about 0.95046 and the sensitivity is about 1.0145 Ω/% RH; with a response time of only 9 s at ambient humidity from 25% RH to 95% RH, the sensor has very good repeatability and stability.https://www.mdpi.com/2072-666X/13/4/504rGO-SDShumiditytestsensitivity
spellingShingle Cheng Lei
Junna Zhang
Ting Liang
Ruifang Liu
Zhujie Zhao
Jijun Xiong
Kai Yin
Humidity Sensor Based on rGO-SDS Composite Film
Micromachines
rGO-SDS
humidity
test
sensitivity
title Humidity Sensor Based on rGO-SDS Composite Film
title_full Humidity Sensor Based on rGO-SDS Composite Film
title_fullStr Humidity Sensor Based on rGO-SDS Composite Film
title_full_unstemmed Humidity Sensor Based on rGO-SDS Composite Film
title_short Humidity Sensor Based on rGO-SDS Composite Film
title_sort humidity sensor based on rgo sds composite film
topic rGO-SDS
humidity
test
sensitivity
url https://www.mdpi.com/2072-666X/13/4/504
work_keys_str_mv AT chenglei humiditysensorbasedonrgosdscompositefilm
AT junnazhang humiditysensorbasedonrgosdscompositefilm
AT tingliang humiditysensorbasedonrgosdscompositefilm
AT ruifangliu humiditysensorbasedonrgosdscompositefilm
AT zhujiezhao humiditysensorbasedonrgosdscompositefilm
AT jijunxiong humiditysensorbasedonrgosdscompositefilm
AT kaiyin humiditysensorbasedonrgosdscompositefilm