Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles

Nowadays low temperature co-fired ceramics (further on: LTCC) are used in sensor technology as sensors and actuators. Sensors and actuators are playing an important role in intelligent road vehicles. These sensors and actuators are built up by LTCC Microsystems. The processing of starch powder and p...

Full description

Bibliographic Details
Main Authors: Eszter Horváth, Ádám Török, Gábor Harsányi
Format: Article
Language:English
Published: Vilnius Gediminas Technical University 2013-04-01
Series:Transport
Subjects:
Online Access:https://journals.vgtu.lt/index.php/Transport/article/view/4090
_version_ 1828952787955744768
author Eszter Horváth
Ádám Török
Gábor Harsányi
author_facet Eszter Horváth
Ádám Török
Gábor Harsányi
author_sort Eszter Horváth
collection DOAJ
description Nowadays low temperature co-fired ceramics (further on: LTCC) are used in sensor technology as sensors and actuators. Sensors and actuators are playing an important role in intelligent road vehicles. These sensors and actuators are built up by LTCC Microsystems. The processing of starch powder and polymer based on sacrificial layer for fabrication of microfluidic structures of LTCC is described in this paper. In order to determine the optimal lamination parameters the quality of the structure was examined for 30 different temperature-pressure-time adjustments. Samples were examined by scanning acoustic microscope to detect the subsurface delamination and internal inhomogenities. The acoustic microscopic image of each sample from different lamination method was evaluated by image processing algorithm in MATLAB environment.
first_indexed 2024-12-14T06:57:25Z
format Article
id doaj.art-2010b161acdb49959b17aae98cde2ef2
institution Directory Open Access Journal
issn 1648-4142
1648-3480
language English
last_indexed 2024-12-14T06:57:25Z
publishDate 2013-04-01
publisher Vilnius Gediminas Technical University
record_format Article
series Transport
spelling doaj.art-2010b161acdb49959b17aae98cde2ef22022-12-21T23:12:35ZengVilnius Gediminas Technical UniversityTransport1648-41421648-34802013-04-0128110.3846/16484142.2013.782464Design and application of low temperature co-fired ceramic substrates for sensors in road vehiclesEszter Horváth0Ádám Török1Gábor Harsányi2Dept of Electronics Technology, Budapest University of Technology and Economics, Egry József str. 18, H-1111 Budapest, HungaryDept of Transport Economics, Budapest University of Technology and Economics, Bertalan Lajos str. 2, H-1111 Budapest, HungaryDept of Electronics Technology, Budapest University of Technology and Economics, Egry József str. 18, H-1111 Budapest, HungaryNowadays low temperature co-fired ceramics (further on: LTCC) are used in sensor technology as sensors and actuators. Sensors and actuators are playing an important role in intelligent road vehicles. These sensors and actuators are built up by LTCC Microsystems. The processing of starch powder and polymer based on sacrificial layer for fabrication of microfluidic structures of LTCC is described in this paper. In order to determine the optimal lamination parameters the quality of the structure was examined for 30 different temperature-pressure-time adjustments. Samples were examined by scanning acoustic microscope to detect the subsurface delamination and internal inhomogenities. The acoustic microscopic image of each sample from different lamination method was evaluated by image processing algorithm in MATLAB environment.https://journals.vgtu.lt/index.php/Transport/article/view/4090LTCCfluidic channellaminationscanning acoustic microscopyceramicsvehicle
spellingShingle Eszter Horváth
Ádám Török
Gábor Harsányi
Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles
Transport
LTCC
fluidic channel
lamination
scanning acoustic microscopy
ceramics
vehicle
title Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles
title_full Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles
title_fullStr Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles
title_full_unstemmed Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles
title_short Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles
title_sort design and application of low temperature co fired ceramic substrates for sensors in road vehicles
topic LTCC
fluidic channel
lamination
scanning acoustic microscopy
ceramics
vehicle
url https://journals.vgtu.lt/index.php/Transport/article/view/4090
work_keys_str_mv AT eszterhorvath designandapplicationoflowtemperaturecofiredceramicsubstratesforsensorsinroadvehicles
AT adamtorok designandapplicationoflowtemperaturecofiredceramicsubstratesforsensorsinroadvehicles
AT gaborharsanyi designandapplicationoflowtemperaturecofiredceramicsubstratesforsensorsinroadvehicles