Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles
Nowadays low temperature co-fired ceramics (further on: LTCC) are used in sensor technology as sensors and actuators. Sensors and actuators are playing an important role in intelligent road vehicles. These sensors and actuators are built up by LTCC Microsystems. The processing of starch powder and p...
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Format: | Article |
Language: | English |
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Vilnius Gediminas Technical University
2013-04-01
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Series: | Transport |
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Online Access: | https://journals.vgtu.lt/index.php/Transport/article/view/4090 |
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author | Eszter Horváth Ádám Török Gábor Harsányi |
author_facet | Eszter Horváth Ádám Török Gábor Harsányi |
author_sort | Eszter Horváth |
collection | DOAJ |
description | Nowadays low temperature co-fired ceramics (further on: LTCC) are used in sensor technology as sensors and actuators. Sensors and actuators are playing an important role in intelligent road vehicles. These sensors and actuators are built up by LTCC Microsystems. The processing of starch powder and polymer based on sacrificial layer for fabrication of microfluidic structures of LTCC is described in this paper. In order to determine the optimal lamination parameters the quality of the structure was examined for 30 different temperature-pressure-time adjustments. Samples were examined by scanning acoustic microscope to detect the subsurface delamination and internal inhomogenities. The acoustic microscopic image of each sample from different lamination method was evaluated by image processing algorithm in MATLAB environment. |
first_indexed | 2024-12-14T06:57:25Z |
format | Article |
id | doaj.art-2010b161acdb49959b17aae98cde2ef2 |
institution | Directory Open Access Journal |
issn | 1648-4142 1648-3480 |
language | English |
last_indexed | 2024-12-14T06:57:25Z |
publishDate | 2013-04-01 |
publisher | Vilnius Gediminas Technical University |
record_format | Article |
series | Transport |
spelling | doaj.art-2010b161acdb49959b17aae98cde2ef22022-12-21T23:12:35ZengVilnius Gediminas Technical UniversityTransport1648-41421648-34802013-04-0128110.3846/16484142.2013.782464Design and application of low temperature co-fired ceramic substrates for sensors in road vehiclesEszter Horváth0Ádám Török1Gábor Harsányi2Dept of Electronics Technology, Budapest University of Technology and Economics, Egry József str. 18, H-1111 Budapest, HungaryDept of Transport Economics, Budapest University of Technology and Economics, Bertalan Lajos str. 2, H-1111 Budapest, HungaryDept of Electronics Technology, Budapest University of Technology and Economics, Egry József str. 18, H-1111 Budapest, HungaryNowadays low temperature co-fired ceramics (further on: LTCC) are used in sensor technology as sensors and actuators. Sensors and actuators are playing an important role in intelligent road vehicles. These sensors and actuators are built up by LTCC Microsystems. The processing of starch powder and polymer based on sacrificial layer for fabrication of microfluidic structures of LTCC is described in this paper. In order to determine the optimal lamination parameters the quality of the structure was examined for 30 different temperature-pressure-time adjustments. Samples were examined by scanning acoustic microscope to detect the subsurface delamination and internal inhomogenities. The acoustic microscopic image of each sample from different lamination method was evaluated by image processing algorithm in MATLAB environment.https://journals.vgtu.lt/index.php/Transport/article/view/4090LTCCfluidic channellaminationscanning acoustic microscopyceramicsvehicle |
spellingShingle | Eszter Horváth Ádám Török Gábor Harsányi Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles Transport LTCC fluidic channel lamination scanning acoustic microscopy ceramics vehicle |
title | Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles |
title_full | Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles |
title_fullStr | Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles |
title_full_unstemmed | Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles |
title_short | Design and application of low temperature co-fired ceramic substrates for sensors in road vehicles |
title_sort | design and application of low temperature co fired ceramic substrates for sensors in road vehicles |
topic | LTCC fluidic channel lamination scanning acoustic microscopy ceramics vehicle |
url | https://journals.vgtu.lt/index.php/Transport/article/view/4090 |
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