Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection
Highly sensitive surface acoustic wave (SAW) sensors have recently been recognized as a promising tool for various industrial and medical applications. However, existing SAW sensors generally suffer from a complex design, large size, and poor robustness. In this paper, we develop a simple and stable...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/1/135 |
| _version_ | 1797342915296493568 |
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| author | Qi Dong Qutong Yang Xiaoyang Liu Shenghe Hu Wenzhe Nie Zhao Jiang Xiaoming Fan Jingting Luo Ran Tao Chen Fu |
| author_facet | Qi Dong Qutong Yang Xiaoyang Liu Shenghe Hu Wenzhe Nie Zhao Jiang Xiaoming Fan Jingting Luo Ran Tao Chen Fu |
| author_sort | Qi Dong |
| collection | DOAJ |
| description | Highly sensitive surface acoustic wave (SAW) sensors have recently been recognized as a promising tool for various industrial and medical applications. However, existing SAW sensors generally suffer from a complex design, large size, and poor robustness. In this paper, we develop a simple and stable delay line ultra-high frequency (UHF) SAW sensor for highly sensitive detection of temperature. A Z-shaped delay line is specially designed on the piezoelectric substrate to improve the sensitivity and reduce the substrate size. Herein, the optimum design parameters of extremely short-pitch interdigital transducers (IDTs) are given by numerical simulations. The extremely short pitch gives the SAW sensor ultra-high operating frequency and consequently ultra-high sensitivity. Several experiments are conducted to demonstrate that the sensitivity of the Z-shaped SAW delay line sensor can reach up to 116.685°/°C for temperature detection. The results show that the sensor is an attractive alternative to current SAW sensing platforms in many applications. |
| first_indexed | 2024-03-08T10:40:06Z |
| format | Article |
| id | doaj.art-203e49b9fee0427690402d045ff19e42 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-08T10:40:06Z |
| publishDate | 2024-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-203e49b9fee0427690402d045ff19e422024-01-26T17:45:26ZengMDPI AGMicromachines2072-666X2024-01-0115113510.3390/mi15010135Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature DetectionQi Dong0Qutong Yang1Xiaoyang Liu2Shenghe Hu3Wenzhe Nie4Zhao Jiang5Xiaoming Fan6Jingting Luo7Ran Tao8Chen Fu9Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaKey Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaHighly sensitive surface acoustic wave (SAW) sensors have recently been recognized as a promising tool for various industrial and medical applications. However, existing SAW sensors generally suffer from a complex design, large size, and poor robustness. In this paper, we develop a simple and stable delay line ultra-high frequency (UHF) SAW sensor for highly sensitive detection of temperature. A Z-shaped delay line is specially designed on the piezoelectric substrate to improve the sensitivity and reduce the substrate size. Herein, the optimum design parameters of extremely short-pitch interdigital transducers (IDTs) are given by numerical simulations. The extremely short pitch gives the SAW sensor ultra-high operating frequency and consequently ultra-high sensitivity. Several experiments are conducted to demonstrate that the sensitivity of the Z-shaped SAW delay line sensor can reach up to 116.685°/°C for temperature detection. The results show that the sensor is an attractive alternative to current SAW sensing platforms in many applications.https://www.mdpi.com/2072-666X/15/1/135surface acoustic wavewirelesshigh frequencytemperature |
| spellingShingle | Qi Dong Qutong Yang Xiaoyang Liu Shenghe Hu Wenzhe Nie Zhao Jiang Xiaoming Fan Jingting Luo Ran Tao Chen Fu Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection Micromachines surface acoustic wave wireless high frequency temperature |
| title | Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection |
| title_full | Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection |
| title_fullStr | Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection |
| title_full_unstemmed | Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection |
| title_short | Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection |
| title_sort | ultra high frequency surface acoustic wave sensors for temperature detection |
| topic | surface acoustic wave wireless high frequency temperature |
| url | https://www.mdpi.com/2072-666X/15/1/135 |
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