Study of Characteristics of Porous Silicon by Electrochemical Etching

In this work, the nanocrystalline porous silicon layer is prepared by electrochemical etching of p-type silicon wafer. The morphological films characterized have been studied of the by atomic force microscopy, XRD and FTIR spectroscopy.The atomic force microscopy investigation shows the average diam...

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Main Author: Hasan Hadi Hussein
Format: Article
Language:English
Published: Unviversity of Technology- Iraq 2013-01-01
Series:Engineering and Technology Journal
Subjects:
Online Access:https://etj.uotechnology.edu.iq/article_83949_6926c2edef69ef8948a7e94740e3be83.pdf
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author Hasan Hadi Hussein
author_facet Hasan Hadi Hussein
author_sort Hasan Hadi Hussein
collection DOAJ
description In this work, the nanocrystalline porous silicon layer is prepared by electrochemical etching of p-type silicon wafer. The morphological films characterized have been studied of the by atomic force microscopy, XRD and FTIR spectroscopy.The atomic force microscopy investigation shows the average diameter pore is increasing with increase of etching time.The X-ray diffraction investigates of the porous silicon layer is shown the broadening the width of the peak compare with the bulk silicon is directly correlated to the size of the nano-scale. The FTIR spectra for porous silicon are shown that the dominant bonds being Si-H groups.
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spelling doaj.art-20402cb8bf49494cbe48c515c8dc46a82024-02-04T17:34:06ZengUnviversity of Technology- IraqEngineering and Technology Journal1681-69002412-07582013-01-01311B343810.30684/etj.31.1B.583949Study of Characteristics of Porous Silicon by Electrochemical EtchingHasan Hadi HusseinIn this work, the nanocrystalline porous silicon layer is prepared by electrochemical etching of p-type silicon wafer. The morphological films characterized have been studied of the by atomic force microscopy, XRD and FTIR spectroscopy.The atomic force microscopy investigation shows the average diameter pore is increasing with increase of etching time.The X-ray diffraction investigates of the porous silicon layer is shown the broadening the width of the peak compare with the bulk silicon is directly correlated to the size of the nano-scale. The FTIR spectra for porous silicon are shown that the dominant bonds being Si-H groups.https://etj.uotechnology.edu.iq/article_83949_6926c2edef69ef8948a7e94740e3be83.pdfporous siliconelectrochemical etchingmorphologicalftir
spellingShingle Hasan Hadi Hussein
Study of Characteristics of Porous Silicon by Electrochemical Etching
Engineering and Technology Journal
porous silicon
electrochemical etching
morphological
ftir
title Study of Characteristics of Porous Silicon by Electrochemical Etching
title_full Study of Characteristics of Porous Silicon by Electrochemical Etching
title_fullStr Study of Characteristics of Porous Silicon by Electrochemical Etching
title_full_unstemmed Study of Characteristics of Porous Silicon by Electrochemical Etching
title_short Study of Characteristics of Porous Silicon by Electrochemical Etching
title_sort study of characteristics of porous silicon by electrochemical etching
topic porous silicon
electrochemical etching
morphological
ftir
url https://etj.uotechnology.edu.iq/article_83949_6926c2edef69ef8948a7e94740e3be83.pdf
work_keys_str_mv AT hasanhadihussein studyofcharacteristicsofporoussiliconbyelectrochemicaletching