A magnetically controlled chemical–mechanical polishing (MC-CMP) approach for fabricating channel-cut silicon crystal optics for the High Energy Photon Source

A magnetically controlled chemical–mechanical polishing (MC-CMP) approach for fabricating channel-cut silicon crystal optics for the High Energy Photon Source

Crystal monochromators are indispensable optical components for the majority of beamlines at synchrotron radiation facilities. Channel-cut monochromators are sometimes chosen to filter monochromatic X-ray beams by virtue of their ultrahigh angular stability. Nevertheless, high-accuracy polishing on...

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Bibliographic Details
Main Authors: Zhen Hong, Qianshun Diao, Wei Xu, Qingxi Yuan, Junliang Yang, Zhongliang Li, Yongcheng Jiang, Changrui Zhang, Dongni Zhang, Fang Liu, Xiaowei Zhang, Peng Liu, Ye Tao, Weifan Sheng, Ming Li, Yidong Zhao
Format: Article
Language:English
Published: International Union of Crystallography 2023-01-01
Series:Journal of Synchrotron Radiation
Subjects:
channel-cut crystal
mc-cmp
high-accuracy roughness
residue-stress free
scratch- and speckle-free
Online Access:http://scripts.iucr.org/cgi-bin/paper?S1600577522011122

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