Dimension Scaling Effects on Conduction and Low Frequency Noise Characteristics of ITO-Stabilized ZnO Thin Film Transistors

Conduction characteristics and low frequency noises in ITO-stabilized ZnO thin film transistors (TFTs) with constant channel width (W=50 μm) and different channel lengths (L=5, 10, 25, 50 and 100 μm) are measured and analysis. Firstly, dependences of threshold voltage and field...

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Main Authors: Yuan Liu, Yu-Xuan Huang, Sunbin Deng, Man Wong, Hoi-Sing Kwok, Rongsheng Chen
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9060960/
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author Yuan Liu
Yu-Xuan Huang
Sunbin Deng
Man Wong
Hoi-Sing Kwok
Rongsheng Chen
author_facet Yuan Liu
Yu-Xuan Huang
Sunbin Deng
Man Wong
Hoi-Sing Kwok
Rongsheng Chen
author_sort Yuan Liu
collection DOAJ
description Conduction characteristics and low frequency noises in ITO-stabilized ZnO thin film transistors (TFTs) with constant channel width (W=50 &#x03BC;m) and different channel lengths (L=5, 10, 25, 50 and 100 &#x03BC;m) are measured and analysis. Firstly, dependences of threshold voltage and field effect mobility on channel length are examined. With decreasing channel length, the threshold voltage shifts to the negative direction which may attribute to carrier diffusion from source/drain to the intrinsic device channel. In addition, significant degradation of field effect mobility is observed in short channel device which are induced by the presence of series contact resistance. The value of contact resistance has also been extracted. Secondly, the drain current noise power spectral densities (S<sub>ID</sub>) are measured at varied effective gate voltages. The measured noises follow a 1/f<sup>&#x03B3;</sup> and y is about -1.1. Moreover, the normalized noises (S<sub>ID</sub>/I<sub>ds</sub>) are dependent linearly on the inverse of channel length and the slope is about -0.75. Finally, the dominant mechanism of low frequency noise in ITO-stabilized ZnO thin film transistor are examined. The slope of normalized noise against effective gate voltage are extracted, which are varied from -1.03 to -1.84 with decreasing channel length and thus it indicates that ITO-stabilized ZnO TFTs varied from bulk dominated devices to interface dominated devices. By using of &#x0394;N-&#x0394;&#x03BC; model, the normalized noises are simulated by considering of contact resistance. Several noise parameters (flat-band voltage noise spectral density, etc) are extracted and analysis.
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spelling doaj.art-214d84bbc8aa4595a770935d6098a60d2022-12-21T23:06:45ZengIEEEIEEE Journal of the Electron Devices Society2168-67342020-01-01843544110.1109/JEDS.2020.29862319060960Dimension Scaling Effects on Conduction and Low Frequency Noise Characteristics of ITO-Stabilized ZnO Thin Film TransistorsYuan Liu0https://orcid.org/0000-0002-7289-2103Yu-Xuan Huang1https://orcid.org/0000-0001-5223-6216Sunbin Deng2https://orcid.org/0000-0002-3428-3120Man Wong3https://orcid.org/0000-0002-2837-6646Hoi-Sing Kwok4Rongsheng Chen5https://orcid.org/0000-0002-7247-8420School of Automation, Guangdong University of Technology, Guangzhou, ChinaSchool of Automation, Guangdong University of Technology, Guangzhou, ChinaDepartment of Electronic and Computer Engineering, State Key Laboratory on Advanced Displays and Optoelectronics Technologies, Hong Kong University of Science and Technology, Hong KongDepartment of Electronic and Computer Engineering, State Key Laboratory on Advanced Displays and Optoelectronics Technologies, Hong Kong University of Science and Technology, Hong KongDepartment of Electronic and Computer Engineering, State Key Laboratory on Advanced Displays and Optoelectronics Technologies, Hong Kong University of Science and Technology, Hong KongSchool of Microelectronics, South China University of Technology, Guangzhou, ChinaConduction characteristics and low frequency noises in ITO-stabilized ZnO thin film transistors (TFTs) with constant channel width (W=50 &#x03BC;m) and different channel lengths (L=5, 10, 25, 50 and 100 &#x03BC;m) are measured and analysis. Firstly, dependences of threshold voltage and field effect mobility on channel length are examined. With decreasing channel length, the threshold voltage shifts to the negative direction which may attribute to carrier diffusion from source/drain to the intrinsic device channel. In addition, significant degradation of field effect mobility is observed in short channel device which are induced by the presence of series contact resistance. The value of contact resistance has also been extracted. Secondly, the drain current noise power spectral densities (S<sub>ID</sub>) are measured at varied effective gate voltages. The measured noises follow a 1/f<sup>&#x03B3;</sup> and y is about -1.1. Moreover, the normalized noises (S<sub>ID</sub>/I<sub>ds</sub>) are dependent linearly on the inverse of channel length and the slope is about -0.75. Finally, the dominant mechanism of low frequency noise in ITO-stabilized ZnO thin film transistor are examined. The slope of normalized noise against effective gate voltage are extracted, which are varied from -1.03 to -1.84 with decreasing channel length and thus it indicates that ITO-stabilized ZnO TFTs varied from bulk dominated devices to interface dominated devices. By using of &#x0394;N-&#x0394;&#x03BC; model, the normalized noises are simulated by considering of contact resistance. Several noise parameters (flat-band voltage noise spectral density, etc) are extracted and analysis.https://ieeexplore.ieee.org/document/9060960/ITO-stabilized ZnOthin film transistorlow frequency noisechannel lengththreshold voltagefield effect mobility
spellingShingle Yuan Liu
Yu-Xuan Huang
Sunbin Deng
Man Wong
Hoi-Sing Kwok
Rongsheng Chen
Dimension Scaling Effects on Conduction and Low Frequency Noise Characteristics of ITO-Stabilized ZnO Thin Film Transistors
IEEE Journal of the Electron Devices Society
ITO-stabilized ZnO
thin film transistor
low frequency noise
channel length
threshold voltage
field effect mobility
title Dimension Scaling Effects on Conduction and Low Frequency Noise Characteristics of ITO-Stabilized ZnO Thin Film Transistors
title_full Dimension Scaling Effects on Conduction and Low Frequency Noise Characteristics of ITO-Stabilized ZnO Thin Film Transistors
title_fullStr Dimension Scaling Effects on Conduction and Low Frequency Noise Characteristics of ITO-Stabilized ZnO Thin Film Transistors
title_full_unstemmed Dimension Scaling Effects on Conduction and Low Frequency Noise Characteristics of ITO-Stabilized ZnO Thin Film Transistors
title_short Dimension Scaling Effects on Conduction and Low Frequency Noise Characteristics of ITO-Stabilized ZnO Thin Film Transistors
title_sort dimension scaling effects on conduction and low frequency noise characteristics of ito stabilized zno thin film transistors
topic ITO-stabilized ZnO
thin film transistor
low frequency noise
channel length
threshold voltage
field effect mobility
url https://ieeexplore.ieee.org/document/9060960/
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AT manwong dimensionscalingeffectsonconductionandlowfrequencynoisecharacteristicsofitostabilizedznothinfilmtransistors
AT hoisingkwok dimensionscalingeffectsonconductionandlowfrequencynoisecharacteristicsofitostabilizedznothinfilmtransistors
AT rongshengchen dimensionscalingeffectsonconductionandlowfrequencynoisecharacteristicsofitostabilizedznothinfilmtransistors