FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality
High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very h...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-06-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/11/6/1527 |
| _version_ | 1797530781188358144 |
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| author | Jakob Hinum-Wagner David Kuhness Gerald Kothleitner Robert Winkler Harald Plank |
| author_facet | Jakob Hinum-Wagner David Kuhness Gerald Kothleitner Robert Winkler Harald Plank |
| author_sort | Jakob Hinum-Wagner |
| collection | DOAJ |
| description | High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very high design flexibility. A limitation, however, is the low fabrication speed, which often restricts 3D-FEBID for the fabrication of single objects. In this study, we approach that challenge by reducing the substrate temperatures with a homemade Peltier stage and investigate the effects on Pt based 3D deposits in a temperature range of <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>5</mn><mo>–</mo><mn>30</mn><mo> </mo><mo>°</mo><mi mathvariant="normal">C</mi><mo>.</mo></mrow></semantics></math></inline-formula> The findings reveal a volume growth rate boost up to a factor of <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>5.6</mn></mrow></semantics></math></inline-formula>, while the shape fidelity in 3D space is maintained. From a materials point of view, the internal nanogranular composition is practically unaffected down to <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>10</mn><mo> </mo><mo>°</mo><mi mathvariant="normal">C</mi></mrow></semantics></math></inline-formula>, followed by a slight grain size increase for even lower temperatures. The study is complemented by a comprehensive discussion about the growth mechanism for a more general picture. The combined findings demonstrate that FEBID on low substrate temperatures is not only much faster, but practically free of drawbacks during high fidelity 3D nanofabrication. |
| first_indexed | 2024-03-10T10:33:53Z |
| format | Article |
| id | doaj.art-21e63e873f32403fa520508e9d3bee6d |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-10T10:33:53Z |
| publishDate | 2021-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-21e63e873f32403fa520508e9d3bee6d2023-11-21T23:23:22ZengMDPI AGNanomaterials2079-49912021-06-01116152710.3390/nano11061527FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the QualityJakob Hinum-Wagner0David Kuhness1Gerald Kothleitner2Robert Winkler3Harald Plank4Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, AustriaChristian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, AustriaInstitute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, AustriaChristian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, AustriaChristian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, AustriaHigh-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very high design flexibility. A limitation, however, is the low fabrication speed, which often restricts 3D-FEBID for the fabrication of single objects. In this study, we approach that challenge by reducing the substrate temperatures with a homemade Peltier stage and investigate the effects on Pt based 3D deposits in a temperature range of <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>5</mn><mo>–</mo><mn>30</mn><mo> </mo><mo>°</mo><mi mathvariant="normal">C</mi><mo>.</mo></mrow></semantics></math></inline-formula> The findings reveal a volume growth rate boost up to a factor of <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>5.6</mn></mrow></semantics></math></inline-formula>, while the shape fidelity in 3D space is maintained. From a materials point of view, the internal nanogranular composition is practically unaffected down to <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>10</mn><mo> </mo><mo>°</mo><mi mathvariant="normal">C</mi></mrow></semantics></math></inline-formula>, followed by a slight grain size increase for even lower temperatures. The study is complemented by a comprehensive discussion about the growth mechanism for a more general picture. The combined findings demonstrate that FEBID on low substrate temperatures is not only much faster, but practically free of drawbacks during high fidelity 3D nanofabrication.https://www.mdpi.com/2079-4991/11/6/15273D nanoprintingdirect write fabricationadditive manufacturingfocused electron beam induced deposition3D-nanostructuressubstrate temperature |
| spellingShingle | Jakob Hinum-Wagner David Kuhness Gerald Kothleitner Robert Winkler Harald Plank FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality Nanomaterials 3D nanoprinting direct write fabrication additive manufacturing focused electron beam induced deposition 3D-nanostructures substrate temperature |
| title | FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality |
| title_full | FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality |
| title_fullStr | FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality |
| title_full_unstemmed | FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality |
| title_short | FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality |
| title_sort | febid 3d nanoprinting at low substrate temperatures pushing the speed while keeping the quality |
| topic | 3D nanoprinting direct write fabrication additive manufacturing focused electron beam induced deposition 3D-nanostructures substrate temperature |
| url | https://www.mdpi.com/2079-4991/11/6/1527 |
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