FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality

FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality

High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very h...

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Bibliographic Details
Main Authors: Jakob Hinum-Wagner, David Kuhness, Gerald Kothleitner, Robert Winkler, Harald Plank
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Nanomaterials
Subjects:
3D nanoprinting
direct write fabrication
additive manufacturing
focused electron beam induced deposition
3D-nanostructures
substrate temperature
Online Access:https://www.mdpi.com/2079-4991/11/6/1527

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https://www.mdpi.com/2079-4991/11/6/1527

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