Investigation of conditions of synthesis of thin films of silver nitride (AgNO3) in a high-frequency low-pressure discharge

Investigation of conditions of synthesis of thin films of silver nitride (AgNO3) in a high-frequency low-pressure discharge

The results of studying the characteristics of a low-pressure high-frequency discharge in air (p = 10 Pa) for the synthesis of thin films from silver nitride, due to the ecton sputtering mechanism of a polycrystalline electrode from the compound Ag2S, are presented. For the synthesis of thin films b...

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Bibliographic Details
Main Authors: O.K. Shuaibov, O.Y. Minya, R.V. Hrytsak, A.O. Malinina, Z.T. Homoki
Format: Article
Language:English
Published: Vasyl Stefanyk Precarpathian National University 2022-09-01
Series:Фізика і хімія твердого тіла
Subjects:
high-frequency discharge
thin films
silver nitride
radiation spectrum
plasma
Online Access:https://journals.pnu.edu.ua/index.php/pcss/article/view/5842

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