GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection
This work demonstrates the improvement of mass detection sensitivity and time response using a simple sensor structure. Indeed, complicated technological processes leading to very brittle sensing structures are often required to reach high sensitivity when we want to detect specific molecules in bio...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2014-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/14/12/22785 |
| _version_ | 1828284005293752320 |
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| author | Tony Chopard Vivien Lacour Therese Leblois |
| author_facet | Tony Chopard Vivien Lacour Therese Leblois |
| author_sort | Tony Chopard |
| collection | DOAJ |
| description | This work demonstrates the improvement of mass detection sensitivity and time response using a simple sensor structure. Indeed, complicated technological processes leading to very brittle sensing structures are often required to reach high sensitivity when we want to detect specific molecules in biological fields. These developments constitute an obstacle to the early diagnosis of diseases. An alternative is the design of coupled structures. In this study, the device is based on the piezoelectric excitation and detection of two GaAs microstructures vibrating in antisymmetric modes. GaAs is a crystal which has the advantage to be micromachined easily using typical clean room processes. Moreover, we showed its high potential in direct biofunctionalisation for use in the biological field. A specific design of the device was performed to improve the detection at low mass and an original detection method has been developed. The principle is to exploit the variation in amplitude at the initial resonance frequency which has in the vicinity of weak added mass the greatest slope. Therefore, we get a very good resolution for an infinitely weak mass: relative voltage variation of 8%/1 fg. The analysis is based on results obtained by finite element simulation. |
| first_indexed | 2024-04-13T08:54:09Z |
| format | Article |
| id | doaj.art-22573f0baac245dfafd8b65c138c29f0 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T08:54:09Z |
| publishDate | 2014-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-22573f0baac245dfafd8b65c138c29f02022-12-22T02:53:22ZengMDPI AGSensors1424-82202014-12-011412227852279710.3390/s141222785s141222785GaAs Coupled Micro Resonators with Enhanced Sensitive Mass DetectionTony Chopard0Vivien Lacour1Therese Leblois2FEMTO-ST Institute, Université de Franche-Comté, 15B avenue des Montboucons, 25030 Besançon Cedex, FranceFEMTO-ST Institute, Université de Franche-Comté, 15B avenue des Montboucons, 25030 Besançon Cedex, FranceFEMTO-ST Institute, Université de Franche-Comté, 15B avenue des Montboucons, 25030 Besançon Cedex, FranceThis work demonstrates the improvement of mass detection sensitivity and time response using a simple sensor structure. Indeed, complicated technological processes leading to very brittle sensing structures are often required to reach high sensitivity when we want to detect specific molecules in biological fields. These developments constitute an obstacle to the early diagnosis of diseases. An alternative is the design of coupled structures. In this study, the device is based on the piezoelectric excitation and detection of two GaAs microstructures vibrating in antisymmetric modes. GaAs is a crystal which has the advantage to be micromachined easily using typical clean room processes. Moreover, we showed its high potential in direct biofunctionalisation for use in the biological field. A specific design of the device was performed to improve the detection at low mass and an original detection method has been developed. The principle is to exploit the variation in amplitude at the initial resonance frequency which has in the vicinity of weak added mass the greatest slope. Therefore, we get a very good resolution for an infinitely weak mass: relative voltage variation of 8%/1 fg. The analysis is based on results obtained by finite element simulation.http://www.mdpi.com/1424-8220/14/12/22785GaAs piezoelectric transducermicrocantileveracoustic couplingultra-sensitivityfinite element methodbiological sensing |
| spellingShingle | Tony Chopard Vivien Lacour Therese Leblois GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection Sensors GaAs piezoelectric transducer microcantilever acoustic coupling ultra-sensitivity finite element method biological sensing |
| title | GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection |
| title_full | GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection |
| title_fullStr | GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection |
| title_full_unstemmed | GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection |
| title_short | GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection |
| title_sort | gaas coupled micro resonators with enhanced sensitive mass detection |
| topic | GaAs piezoelectric transducer microcantilever acoustic coupling ultra-sensitivity finite element method biological sensing |
| url | http://www.mdpi.com/1424-8220/14/12/22785 |
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