Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors
Electrothermal piezoresistive resonant cantilever sensors have been fabricated with embedded actuating (heating resistor) and sensing (piezo resistors) parts, with the latter configured in a Wheatstone bridge circuit. Due to the close spacing between these two elements, a direct thermal parasitic ef...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-04-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/24/7/2318 |
| _version_ | 1797211928110563328 |
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| author | Andi Setiono Nelfyenny Wilson Ombati Nyang’au Erwin Peiner |
| author_facet | Andi Setiono Nelfyenny Wilson Ombati Nyang’au Erwin Peiner |
| author_sort | Andi Setiono |
| collection | DOAJ |
| description | Electrothermal piezoresistive resonant cantilever sensors have been fabricated with embedded actuating (heating resistor) and sensing (piezo resistors) parts, with the latter configured in a Wheatstone bridge circuit. Due to the close spacing between these two elements, a direct thermal parasitic effect on the resonant sensor during the actuating-sensing process leads to asymmetric amplitude and reversing phase spectral responses. Such a condition affects the precise determination of the cantilever’s resonant frequency, <i>f</i><sub>0</sub>. Moreover, in the context of phase-locked loop-based (PLL) resonance tracking, a reversing phase spectral response hinders the resonance locking due to its ambiguity. In this work, a replica of the baseline spectral was applied to remove the thermal parasitic effect on the resonance spectra of the cantilever sensor, and its capability was simulated through mathematical analysis. This replica spectral was subtracted from the parasitized spectral using a particular calculation, resulting in optimized spectral responses. An assessment using cigarette smoke particles performed a desired spectral shifting into symmetrical amplitude shapes and monotonic phase transitions, subsequently allowing for real-time PLL-based frequency tracking. |
| first_indexed | 2024-04-24T10:34:16Z |
| format | Article |
| id | doaj.art-2273630443d2486f837cab2322236892 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-24T10:34:16Z |
| publishDate | 2024-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-2273630443d2486f837cab23222368922024-04-12T13:26:45ZengMDPI AGSensors1424-82202024-04-01247231810.3390/s24072318Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant SensorsAndi Setiono0Nelfyenny1Wilson Ombati Nyang’au2Erwin Peiner3Laboratory for Emerging Nanometrology (LENA), Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, 38106 Braunschweig, GermanyResearch Center for Photonics—National Research and Innovation Agency (BRIN), South Tangerang 15314, IndonesiaLaboratory for Emerging Nanometrology (LENA), Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, 38106 Braunschweig, GermanyElectrothermal piezoresistive resonant cantilever sensors have been fabricated with embedded actuating (heating resistor) and sensing (piezo resistors) parts, with the latter configured in a Wheatstone bridge circuit. Due to the close spacing between these two elements, a direct thermal parasitic effect on the resonant sensor during the actuating-sensing process leads to asymmetric amplitude and reversing phase spectral responses. Such a condition affects the precise determination of the cantilever’s resonant frequency, <i>f</i><sub>0</sub>. Moreover, in the context of phase-locked loop-based (PLL) resonance tracking, a reversing phase spectral response hinders the resonance locking due to its ambiguity. In this work, a replica of the baseline spectral was applied to remove the thermal parasitic effect on the resonance spectra of the cantilever sensor, and its capability was simulated through mathematical analysis. This replica spectral was subtracted from the parasitized spectral using a particular calculation, resulting in optimized spectral responses. An assessment using cigarette smoke particles performed a desired spectral shifting into symmetrical amplitude shapes and monotonic phase transitions, subsequently allowing for real-time PLL-based frequency tracking.https://www.mdpi.com/1424-8220/24/7/2318electrothermal-piezoresistive-cantilever sensorthermal parasitic couplingresonant MEMS sensorphase-locked-loopreplica of baseline spectra |
| spellingShingle | Andi Setiono Nelfyenny Wilson Ombati Nyang’au Erwin Peiner Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors Sensors electrothermal-piezoresistive-cantilever sensor thermal parasitic coupling resonant MEMS sensor phase-locked-loop replica of baseline spectra |
| title | Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors |
| title_full | Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors |
| title_fullStr | Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors |
| title_full_unstemmed | Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors |
| title_short | Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors |
| title_sort | replicating spectral baseline for unambiguous frequency locking in resonant sensors |
| topic | electrothermal-piezoresistive-cantilever sensor thermal parasitic coupling resonant MEMS sensor phase-locked-loop replica of baseline spectra |
| url | https://www.mdpi.com/1424-8220/24/7/2318 |
| work_keys_str_mv | AT andisetiono replicatingspectralbaselineforunambiguousfrequencylockinginresonantsensors AT nelfyenny replicatingspectralbaselineforunambiguousfrequencylockinginresonantsensors AT wilsonombatinyangau replicatingspectralbaselineforunambiguousfrequencylockinginresonantsensors AT erwinpeiner replicatingspectralbaselineforunambiguousfrequencylockinginresonantsensors |