Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices
Integrated microfluidic devices with nanosized array electrodes and microfiltration capabilities can greatly increase sensitivity and enhance automation in immunoassay devices. In this contribution, we utilize the edge-patterning method of thin aluminum (Al) films in order to form nano- to micron-si...
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| Format: | Article |
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MDPI AG
2015-03-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/15/3/6091 |
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| author | Nhi M. Doan Liangliang Qiang Zhe Li Santhisagar Vaddiraju Gregory W. Bishop James F. Rusling Fotios Papadimitrakopoulos |
| author_facet | Nhi M. Doan Liangliang Qiang Zhe Li Santhisagar Vaddiraju Gregory W. Bishop James F. Rusling Fotios Papadimitrakopoulos |
| author_sort | Nhi M. Doan |
| collection | DOAJ |
| description | Integrated microfluidic devices with nanosized array electrodes and microfiltration capabilities can greatly increase sensitivity and enhance automation in immunoassay devices. In this contribution, we utilize the edge-patterning method of thin aluminum (Al) films in order to form nano- to micron-sized gaps. Evaporation of high work-function metals (i.e., Au, Ag, etc.) on these gaps, followed by Al lift-off, enables the formation of electrical uniform nanowires from low-cost, plastic-based, photomasks. By replacing Al with chromium (Cr), the formation of high resolution, custom-made photomasks that are ideal for low-cost fabrication of a plurality of array devices were realized. To demonstrate the feasibility of such Cr photomasks, SU-8 micro-pillar masters were formed and replicated into PDMS to produce micron-sized filters with 3–4 µm gaps and an aspect ratio of 3. These microfilters were capable of retaining 6 µm beads within a localized site, while allowing solvent flow. The combination of nanowire arrays and micro-pillar filtration opens new perspectives for rapid R&D screening of various microfluidic-based immunoassay geometries, where analyte pre-concentration and highly sensitive, electrochemical detection can be readily co-localized. |
| first_indexed | 2024-04-11T22:51:29Z |
| format | Article |
| id | doaj.art-22b5d98354cf40ea9c5520781a0aced7 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T22:51:29Z |
| publishDate | 2015-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-22b5d98354cf40ea9c5520781a0aced72022-12-22T03:58:34ZengMDPI AGSensors1424-82202015-03-011536091610410.3390/s150306091s150306091Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay DevicesNhi M. Doan0Liangliang Qiang1Zhe Li2Santhisagar Vaddiraju3Gregory W. Bishop4James F. Rusling5Fotios Papadimitrakopoulos6Nanomaterials Optoelectronics Laboratory, Polymer Program, University of Connecticut, Storrs, CT 06269, USANanomaterials Optoelectronics Laboratory, Polymer Program, University of Connecticut, Storrs, CT 06269, USANanomaterials Optoelectronics Laboratory, Polymer Program, University of Connecticut, Storrs, CT 06269, USANanomaterials Optoelectronics Laboratory, Polymer Program, University of Connecticut, Storrs, CT 06269, USADepartment of Chemistry, University of Connecticut, Storrs, CT 06269, USADepartment of Chemistry, University of Connecticut, Storrs, CT 06269, USANanomaterials Optoelectronics Laboratory, Polymer Program, University of Connecticut, Storrs, CT 06269, USAIntegrated microfluidic devices with nanosized array electrodes and microfiltration capabilities can greatly increase sensitivity and enhance automation in immunoassay devices. In this contribution, we utilize the edge-patterning method of thin aluminum (Al) films in order to form nano- to micron-sized gaps. Evaporation of high work-function metals (i.e., Au, Ag, etc.) on these gaps, followed by Al lift-off, enables the formation of electrical uniform nanowires from low-cost, plastic-based, photomasks. By replacing Al with chromium (Cr), the formation of high resolution, custom-made photomasks that are ideal for low-cost fabrication of a plurality of array devices were realized. To demonstrate the feasibility of such Cr photomasks, SU-8 micro-pillar masters were formed and replicated into PDMS to produce micron-sized filters with 3–4 µm gaps and an aspect ratio of 3. These microfilters were capable of retaining 6 µm beads within a localized site, while allowing solvent flow. The combination of nanowire arrays and micro-pillar filtration opens new perspectives for rapid R&D screening of various microfluidic-based immunoassay geometries, where analyte pre-concentration and highly sensitive, electrochemical detection can be readily co-localized.http://www.mdpi.com/1424-8220/15/3/6091nanowirenanogapsmicroelectrode arrayssensorimmunoassaymicrofluidicphotolithographyisotropic etching |
| spellingShingle | Nhi M. Doan Liangliang Qiang Zhe Li Santhisagar Vaddiraju Gregory W. Bishop James F. Rusling Fotios Papadimitrakopoulos Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices Sensors nanowire nanogaps microelectrode arrays sensor immunoassay microfluidic photolithography isotropic etching |
| title | Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices |
| title_full | Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices |
| title_fullStr | Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices |
| title_full_unstemmed | Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices |
| title_short | Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices |
| title_sort | low cost photolithographic fabrication of nanowires and microfilters for advanced bioassay devices |
| topic | nanowire nanogaps microelectrode arrays sensor immunoassay microfluidic photolithography isotropic etching |
| url | http://www.mdpi.com/1424-8220/15/3/6091 |
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