Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices

Low-Cost Photolithographic Fabrication of Nanowires and Microfilters for Advanced Bioassay Devices

Integrated microfluidic devices with nanosized array electrodes and microfiltration capabilities can greatly increase sensitivity and enhance automation in immunoassay devices. In this contribution, we utilize the edge-patterning method of thin aluminum (Al) films in order to form nano- to micron-si...

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Bibliographic Details
Main Authors:	Nhi M. Doan, Liangliang Qiang, Zhe Li, Santhisagar Vaddiraju, Gregory W. Bishop, James F. Rusling, Fotios Papadimitrakopoulos
Format:	Article
Language:	English
Published:	MDPI AG 2015-03-01
Series:	Sensors
Subjects:	nanowire nanogaps microelectrode arrays sensor immunoassay microfluidic photolithography isotropic etching
Online Access:	http://www.mdpi.com/1424-8220/15/3/6091

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