Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator geometries designed for ultrasensitive detection operating...

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Bibliographic Details
Main Authors:	Rafel Perelló-Roig, Jaume Verd, Sebastià Bota, Jaume Segura
Format:	Article
Language:	English
Published:	MDPI AG 2018-09-01
Series:	Sensors
Subjects:	MEMS resonators thermomechanical noise sensors CMOS-MEMS
Online Access:	http://www.mdpi.com/1424-8220/18/9/3124

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