Refractive Index Compensation in Over-Determined Interferometric Systems

We present an interferometric technique based on a differential interferometry setup for measurement under atmospheric conditions. The key limiting factor in any interferometric dimensional measurement are fluctuations of the refractive index of air representing a dominating source of uncertainty wh...

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Main Authors: Zdeněk Buchta, Jan Hrabina, Martin Čížek, Ondřej Číp, Miroslava Holá, Josef Lazar
Format: Article
Language:English
Published: MDPI AG 2012-10-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/12/10/14084
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author Zdeněk Buchta
Jan Hrabina
Martin Čížek
Ondřej Číp
Miroslava Holá
Josef Lazar
author_facet Zdeněk Buchta
Jan Hrabina
Martin Čížek
Ondřej Číp
Miroslava Holá
Josef Lazar
author_sort Zdeněk Buchta
collection DOAJ
description We present an interferometric technique based on a differential interferometry setup for measurement under atmospheric conditions. The key limiting factor in any interferometric dimensional measurement are fluctuations of the refractive index of air representing a dominating source of uncertainty when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of an over-determined interferometric setup where a reference length is derived from a mechanical frame made from a material with a very low thermal coefficient. The technique allows one to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range, acting as a tracking refractometer. The principle is demonstrated in an experimental setup.
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spelling doaj.art-232add4aebb142ada258ab6927c2d2ad2022-12-22T02:07:53ZengMDPI AGSensors1424-82202012-10-011210140841409410.3390/s121014084Refractive Index Compensation in Over-Determined Interferometric SystemsZdeněk BuchtaJan HrabinaMartin ČížekOndřej ČípMiroslava HoláJosef LazarWe present an interferometric technique based on a differential interferometry setup for measurement under atmospheric conditions. The key limiting factor in any interferometric dimensional measurement are fluctuations of the refractive index of air representing a dominating source of uncertainty when evaluated indirectly from the physical parameters of the atmosphere. Our proposal is based on the concept of an over-determined interferometric setup where a reference length is derived from a mechanical frame made from a material with a very low thermal coefficient. The technique allows one to track the variations of the refractive index of air on-line directly in the line of the measuring beam and to compensate for the fluctuations. The optical setup consists of three interferometers sharing the same beam path where two measure differentially the displacement while the third evaluates the changes in the measuring range, acting as a tracking refractometer. The principle is demonstrated in an experimental setup.http://www.mdpi.com/1424-8220/12/10/14084refractometrynanopositioninginterferometrynanometrology
spellingShingle Zdeněk Buchta
Jan Hrabina
Martin Čížek
Ondřej Číp
Miroslava Holá
Josef Lazar
Refractive Index Compensation in Over-Determined Interferometric Systems
Sensors
refractometry
nanopositioning
interferometry
nanometrology
title Refractive Index Compensation in Over-Determined Interferometric Systems
title_full Refractive Index Compensation in Over-Determined Interferometric Systems
title_fullStr Refractive Index Compensation in Over-Determined Interferometric Systems
title_full_unstemmed Refractive Index Compensation in Over-Determined Interferometric Systems
title_short Refractive Index Compensation in Over-Determined Interferometric Systems
title_sort refractive index compensation in over determined interferometric systems
topic refractometry
nanopositioning
interferometry
nanometrology
url http://www.mdpi.com/1424-8220/12/10/14084
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AT martincizek refractiveindexcompensationinoverdeterminedinterferometricsystems
AT ondrejcip refractiveindexcompensationinoverdeterminedinterferometricsystems
AT miroslavahola refractiveindexcompensationinoverdeterminedinterferometricsystems
AT joseflazar refractiveindexcompensationinoverdeterminedinterferometricsystems