Refractive Index Compensation in Over-Determined Interferometric Systems

Refractive Index Compensation in Over-Determined Interferometric Systems

We present an interferometric technique based on a differential interferometry setup for measurement under atmospheric conditions. The key limiting factor in any interferometric dimensional measurement are fluctuations of the refractive index of air representing a dominating source of uncertainty wh...

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Bibliographic Details
Main Authors: Zdeněk Buchta, Jan Hrabina, Martin Čížek, Ondřej Číp, Miroslava Holá, Josef Lazar
Format: Article
Language:English
Published: MDPI AG 2012-10-01
Series:Sensors
Subjects:
refractometry
nanopositioning
interferometry
nanometrology
Online Access:http://www.mdpi.com/1424-8220/12/10/14084

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