Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

The effect of soft X-ray irradiation on hydrogenated silicon-containing diamond-like carbon (Si-DLC) films intended for outer space applications was investigated by using synchrotron radiation (SR). We found that the reduction in film thickness was about 60 nm after 1600 mA·h SR exposure, whereas th...

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Bibliographic Details
Main Authors:	Kazuhiro Kanda, Ryo Imai, Shotaro Tanaka, Shuto Suzuki, Masahito Niibe, Takayuki Hasegawa, Tsuneo Suzuki, Hiroki Akasaka
Format:	Article
Language:	English
Published:	MDPI AG 2021-02-01
Series:	Materials
Subjects:	diamond-like carbon Si containing diamond-like carbon film soft X-ray synchrotron radiation X-ray reflectivity elastic recoil detection analysis
Online Access:	https://www.mdpi.com/1996-1944/14/4/924

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