Water‐Based Solution Processing and Wafer‐Scale Integration of All‐Graphene Humidity Sensors

Abstract One of the main advantages of 2D materials for various applications is that they can be prepared in form of water‐based solutions. The high yield and cost‐effectiveness of this method make them of great interest for printed electronics, composites, and bio‐ and healthcare technologies. Howe...

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Main Authors: Elias Torres Alonso, Dong‐Wook Shin, Gopika Rajan, Ana I. S. Neves, Saverio Russo, Monica F. Craciun
Format: Article
Language:English
Published: Wiley 2019-08-01
Series:Advanced Science
Subjects:
Online Access:https://doi.org/10.1002/advs.201802318
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author Elias Torres Alonso
Dong‐Wook Shin
Gopika Rajan
Ana I. S. Neves
Saverio Russo
Monica F. Craciun
author_facet Elias Torres Alonso
Dong‐Wook Shin
Gopika Rajan
Ana I. S. Neves
Saverio Russo
Monica F. Craciun
author_sort Elias Torres Alonso
collection DOAJ
description Abstract One of the main advantages of 2D materials for various applications is that they can be prepared in form of water‐based solutions. The high yield and cost‐effectiveness of this method make them of great interest for printed electronics, composites, and bio‐ and healthcare technologies. However, once deposited on a substrate, etching away these solution‐processed materials is a difficult task, yet crucial for pattern definition and thus device fabrication. In particular, the realization of micrometer‐sized patterns requires mesh and paste optimization when screen‐printed or solvent‐engineered and surface functionalization when inkjet‐printed, both usually involving additional postdeposition steps. These constraints are holding back the integration of these 2D materials in devices and applications. In this work, a method for the fabrication of micrometer‐sized well‐defined patterns in water‐based 2D materials is presented, with an extensive characterization of the films and patterns obtained. The method is ultimately used to create humidity sensors with performance comparable to that of commercial ones. These sensor devices are fabricated onto a 4′ silicon and polyethylene terephthalate (PET) wafers to create all‐graphene humidity sensors that are flexible, transparent, and compatible with current complementary metal–oxide–semiconductor (CMOS) and roll‐to‐roll workflows.
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spelling doaj.art-2403700181ac4c6d88f40adfaca0663f2022-12-22T02:44:53ZengWileyAdvanced Science2198-38442019-08-01615n/an/a10.1002/advs.201802318Water‐Based Solution Processing and Wafer‐Scale Integration of All‐Graphene Humidity SensorsElias Torres Alonso0Dong‐Wook Shin1Gopika Rajan2Ana I. S. Neves3Saverio Russo4Monica F. Craciun5Centre for Graphene Science, College of Engineering, Mathematics and Physical Sciences University of Exeter EX4 4QF Exeter UKCentre for Graphene Science, College of Engineering, Mathematics and Physical Sciences University of Exeter EX4 4QF Exeter UKCentre for Graphene Science, College of Engineering, Mathematics and Physical Sciences University of Exeter EX4 4QF Exeter UKCentre for Graphene Science, College of Engineering, Mathematics and Physical Sciences University of Exeter EX4 4QF Exeter UKCentre for Graphene Science, College of Engineering, Mathematics and Physical Sciences University of Exeter EX4 4QF Exeter UKCentre for Graphene Science, College of Engineering, Mathematics and Physical Sciences University of Exeter EX4 4QF Exeter UKAbstract One of the main advantages of 2D materials for various applications is that they can be prepared in form of water‐based solutions. The high yield and cost‐effectiveness of this method make them of great interest for printed electronics, composites, and bio‐ and healthcare technologies. However, once deposited on a substrate, etching away these solution‐processed materials is a difficult task, yet crucial for pattern definition and thus device fabrication. In particular, the realization of micrometer‐sized patterns requires mesh and paste optimization when screen‐printed or solvent‐engineered and surface functionalization when inkjet‐printed, both usually involving additional postdeposition steps. These constraints are holding back the integration of these 2D materials in devices and applications. In this work, a method for the fabrication of micrometer‐sized well‐defined patterns in water‐based 2D materials is presented, with an extensive characterization of the films and patterns obtained. The method is ultimately used to create humidity sensors with performance comparable to that of commercial ones. These sensor devices are fabricated onto a 4′ silicon and polyethylene terephthalate (PET) wafers to create all‐graphene humidity sensors that are flexible, transparent, and compatible with current complementary metal–oxide–semiconductor (CMOS) and roll‐to‐roll workflows.https://doi.org/10.1002/advs.201802318complementary metal–oxide–semiconductors (CMOSs)graphene oxidepatterningroll‐to‐rollsensorswater‐exfoliated graphene
spellingShingle Elias Torres Alonso
Dong‐Wook Shin
Gopika Rajan
Ana I. S. Neves
Saverio Russo
Monica F. Craciun
Water‐Based Solution Processing and Wafer‐Scale Integration of All‐Graphene Humidity Sensors
Advanced Science
complementary metal–oxide–semiconductors (CMOSs)
graphene oxide
patterning
roll‐to‐roll
sensors
water‐exfoliated graphene
title Water‐Based Solution Processing and Wafer‐Scale Integration of All‐Graphene Humidity Sensors
title_full Water‐Based Solution Processing and Wafer‐Scale Integration of All‐Graphene Humidity Sensors
title_fullStr Water‐Based Solution Processing and Wafer‐Scale Integration of All‐Graphene Humidity Sensors
title_full_unstemmed Water‐Based Solution Processing and Wafer‐Scale Integration of All‐Graphene Humidity Sensors
title_short Water‐Based Solution Processing and Wafer‐Scale Integration of All‐Graphene Humidity Sensors
title_sort water based solution processing and wafer scale integration of all graphene humidity sensors
topic complementary metal–oxide–semiconductors (CMOSs)
graphene oxide
patterning
roll‐to‐roll
sensors
water‐exfoliated graphene
url https://doi.org/10.1002/advs.201802318
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