Penentuan Konstanta Optis di Daerah Absorpsi Fundamental Menggunakan Formulasi Forouhi dan Bloomer untuk Lapisan Tipis Amorf Silikon Karbon (A-Sic:H)
An expression of the imaginary and real parts of the complex refractive index derived by Forouhi and Bloomer have been applied to obtain wider energy range of optical constants for amorphous silicon carbon (a-SiC:H) films deposited by dc sputtering method using silicon and graphite targets. Excellen...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Universitas Indonesia
2002-08-01
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| Series: | Makara Seri Sains |
| Subjects: | |
| Online Access: | http://journal.ui.ac.id/science/article/view/144/140 |
| _version_ | 1811258159527886848 |
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| author | Dewi Marianty Lusitra Munisa Rosari Saleh |
| author_facet | Dewi Marianty Lusitra Munisa Rosari Saleh |
| author_sort | Dewi Marianty |
| collection | DOAJ |
| description | An expression of the imaginary and real parts of the complex refractive index derived by Forouhi and Bloomer have been applied to obtain wider energy range of optical constants for amorphous silicon carbon (a-SiC:H) films deposited by dc sputtering method using silicon and graphite targets. Excellent agreement was obtained between the formula and experimentally measured values of both n(E) and k(E). The optical constants obey Kramers-Kronig dispersion relation and show a maximum at high-energy range. The dependence of five parameters to carbon concentration and the variation of optical constants with composition for both targets will be discussed. |
| first_indexed | 2024-04-12T18:09:54Z |
| format | Article |
| id | doaj.art-24054bbf0dcf45f285d76e8ed7fba140 |
| institution | Directory Open Access Journal |
| issn | 1693-6671 |
| language | English |
| last_indexed | 2024-04-12T18:09:54Z |
| publishDate | 2002-08-01 |
| publisher | Universitas Indonesia |
| record_format | Article |
| series | Makara Seri Sains |
| spelling | doaj.art-24054bbf0dcf45f285d76e8ed7fba1402022-12-22T03:21:52ZengUniversitas IndonesiaMakara Seri Sains1693-66712002-08-010625964Penentuan Konstanta Optis di Daerah Absorpsi Fundamental Menggunakan Formulasi Forouhi dan Bloomer untuk Lapisan Tipis Amorf Silikon Karbon (A-Sic:H)Dewi MariantyLusitra MunisaRosari SalehAn expression of the imaginary and real parts of the complex refractive index derived by Forouhi and Bloomer have been applied to obtain wider energy range of optical constants for amorphous silicon carbon (a-SiC:H) films deposited by dc sputtering method using silicon and graphite targets. Excellent agreement was obtained between the formula and experimentally measured values of both n(E) and k(E). The optical constants obey Kramers-Kronig dispersion relation and show a maximum at high-energy range. The dependence of five parameters to carbon concentration and the variation of optical constants with composition for both targets will be discussed.http://journal.ui.ac.id/science/article/view/144/140optical constantsabsorptionamorphous silicon carbonsputtering |
| spellingShingle | Dewi Marianty Lusitra Munisa Rosari Saleh Penentuan Konstanta Optis di Daerah Absorpsi Fundamental Menggunakan Formulasi Forouhi dan Bloomer untuk Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) Makara Seri Sains optical constants absorption amorphous silicon carbon sputtering |
| title | Penentuan Konstanta Optis di Daerah Absorpsi Fundamental Menggunakan Formulasi Forouhi dan Bloomer untuk Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) |
| title_full | Penentuan Konstanta Optis di Daerah Absorpsi Fundamental Menggunakan Formulasi Forouhi dan Bloomer untuk Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) |
| title_fullStr | Penentuan Konstanta Optis di Daerah Absorpsi Fundamental Menggunakan Formulasi Forouhi dan Bloomer untuk Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) |
| title_full_unstemmed | Penentuan Konstanta Optis di Daerah Absorpsi Fundamental Menggunakan Formulasi Forouhi dan Bloomer untuk Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) |
| title_short | Penentuan Konstanta Optis di Daerah Absorpsi Fundamental Menggunakan Formulasi Forouhi dan Bloomer untuk Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) |
| title_sort | penentuan konstanta optis di daerah absorpsi fundamental menggunakan formulasi forouhi dan bloomer untuk lapisan tipis amorf silikon karbon a sic h |
| topic | optical constants absorption amorphous silicon carbon sputtering |
| url | http://journal.ui.ac.id/science/article/view/144/140 |
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