DIFFERENT SCHEMES FOR OBTAINING FRACTAL RELIEF OF NANOSIZED PLATINUM FILMS

The morphology of the relief of nanosized platinum films on the mica surface is investigated using the scanning probe (in the atomic force mode) and tunneling microscopy. Platinum films were investigated immediately after their preparation in a magnetron sputtering facility, as well as after anneali...

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Main Authors: D.V. Ivanov, A.S. Antonov, E.M. Semenova, A.I. Ivanova, V.A. Anofriev, N.Yu. Sdobnyakov
Format: Article
Language:Russian
Published: Tver State University 2021-12-01
Series:Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов
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Online Access:https://physchemaspects.ru/2021/doi-10-26456-pcascnn-2021-13-156/?lang=en
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author D.V. Ivanov
A.S. Antonov
E.M. Semenova
A.I. Ivanova
V.A. Anofriev
N.Yu. Sdobnyakov
author_facet D.V. Ivanov
A.S. Antonov
E.M. Semenova
A.I. Ivanova
V.A. Anofriev
N.Yu. Sdobnyakov
author_sort D.V. Ivanov
collection DOAJ
description The morphology of the relief of nanosized platinum films on the mica surface is investigated using the scanning probe (in the atomic force mode) and tunneling microscopy. Platinum films were investigated immediately after their preparation in a magnetron sputtering facility, as well as after annealing in a muffle furnace in an air atmosphere. Annealing made it possible to establish the possible ranges of variation of the fractal dimension and the altitude parameters corresponding to degradation of the nanorelief. The values of the fractal dimension were obtained for films of different thicknesses using two alternative methods of investigation at different initial scales of samples: based on the data of an atomic force microscope – Dc=2,17÷2,38 and a scanning tunneling microscope – Dc=2,28÷2,50 depending on the sequence of deposition of layers and annealing of films. For comparison, experimental data of other authors are presented. The choice of the sequence of operations for magnetron sputtering and annealing, and external conditions makes it possible to formulate recommendations for development of the technology for «growing» structures with a given surface morphology.
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spelling doaj.art-245802aed71c4f6a9e346611f9a1385b2022-12-21T22:43:29ZrusTver State UniversityФизико-химические аспекты изучения кластеров, наноструктур и наноматериалов2226-44422658-43602021-12-011315616510.26456/pcascnn/2021.13.156DIFFERENT SCHEMES FOR OBTAINING FRACTAL RELIEF OF NANOSIZED PLATINUM FILMSD.V. Ivanov0A.S. Antonov1E.M. Semenova2A.I. Ivanova3V.A. Anofriev4N.Yu. Sdobnyakov5Tver State University, Tver, RussiaTver State University, Tver, Russia; Tver State Agricultural Academy, Tver, RussiaTver State University, Tver, RussiaTver State University, Tver, RussiaTver State University, Tver, RussiaTver State University, Tver, RussiaThe morphology of the relief of nanosized platinum films on the mica surface is investigated using the scanning probe (in the atomic force mode) and tunneling microscopy. Platinum films were investigated immediately after their preparation in a magnetron sputtering facility, as well as after annealing in a muffle furnace in an air atmosphere. Annealing made it possible to establish the possible ranges of variation of the fractal dimension and the altitude parameters corresponding to degradation of the nanorelief. The values of the fractal dimension were obtained for films of different thicknesses using two alternative methods of investigation at different initial scales of samples: based on the data of an atomic force microscope – Dc=2,17÷2,38 and a scanning tunneling microscope – Dc=2,28÷2,50 depending on the sequence of deposition of layers and annealing of films. For comparison, experimental data of other authors are presented. The choice of the sequence of operations for magnetron sputtering and annealing, and external conditions makes it possible to formulate recommendations for development of the technology for «growing» structures with a given surface morphology.https://physchemaspects.ru/2021/doi-10-26456-pcascnn-2021-13-156/?lang=enscanning probe microscopyatomic force microscope modescanning tunneling microscopymagnetron sputteringannealingnanoreliefroughness parametersfractal dimensionplatinum films
spellingShingle D.V. Ivanov
A.S. Antonov
E.M. Semenova
A.I. Ivanova
V.A. Anofriev
N.Yu. Sdobnyakov
DIFFERENT SCHEMES FOR OBTAINING FRACTAL RELIEF OF NANOSIZED PLATINUM FILMS
Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов
scanning probe microscopy
atomic force microscope mode
scanning tunneling microscopy
magnetron sputtering
annealing
nanorelief
roughness parameters
fractal dimension
platinum films
title DIFFERENT SCHEMES FOR OBTAINING FRACTAL RELIEF OF NANOSIZED PLATINUM FILMS
title_full DIFFERENT SCHEMES FOR OBTAINING FRACTAL RELIEF OF NANOSIZED PLATINUM FILMS
title_fullStr DIFFERENT SCHEMES FOR OBTAINING FRACTAL RELIEF OF NANOSIZED PLATINUM FILMS
title_full_unstemmed DIFFERENT SCHEMES FOR OBTAINING FRACTAL RELIEF OF NANOSIZED PLATINUM FILMS
title_short DIFFERENT SCHEMES FOR OBTAINING FRACTAL RELIEF OF NANOSIZED PLATINUM FILMS
title_sort different schemes for obtaining fractal relief of nanosized platinum films
topic scanning probe microscopy
atomic force microscope mode
scanning tunneling microscopy
magnetron sputtering
annealing
nanorelief
roughness parameters
fractal dimension
platinum films
url https://physchemaspects.ru/2021/doi-10-26456-pcascnn-2021-13-156/?lang=en
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AT aiivanova differentschemesforobtainingfractalreliefofnanosizedplatinumfilms
AT vaanofriev differentschemesforobtainingfractalreliefofnanosizedplatinumfilms
AT nyusdobnyakov differentschemesforobtainingfractalreliefofnanosizedplatinumfilms