Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources - Atsushi Tanide; Shohei Nakamura; Akira Horikoshi; Shigeru Takatsuji; Takahiro Kimura; Kazuo Kinose; Soichi Nadahara; Masazumi Nishikawa; Akinori Ebe; Kenji Ishikawa; Osamu Oda; Masaru Hori (ACS Omega, 2020)