Effectiveness of Sound Field Corrections for High-Frequency Pressure Comparison Calibration of MEMS Microphones

Effectiveness of Sound Field Corrections for High-Frequency Pressure Comparison Calibration of MEMS Microphones

The calibration of Micro-Electro-Mechanical System (MEMS) microphones remains a critical challenge due to their miniaturized geometry and sensitivity to non-uniform acoustic fields. This study presents an advanced calibration methodology that integrates Finite Element Method (FEM) simulations with e...

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Bibliographic Details
Main Authors:	Fabio Saba, María Campo-Valera, Davide Paesante, Giovanni Durando, Mario Corallo, Diego Pugliese
Format:	Article
Language:	English
Published:	MDPI AG 2025-02-01
Series:	Sensors
Subjects:	MEMS microphone pressure comparison calibration acoustic field sound field corrections FEM acoustic metrology
Online Access:	https://www.mdpi.com/1424-8220/25/5/1312

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