Bonding of a Carbon Nanotube Film to a Au Film at Low Temperature and Contact Resistance of the Film under Micronewton Loads
A process for bonding a carbon nanotube (CNT) film to a Au film at low temperature was developed with a view to using the CNT films as electrical contact materials in radio-frequency microelectromechanical systems (RF MEMS) switches. First, a CNT film was synthesized on a silicon substrate at 750 &a...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Japanese Society of Tribologists
2011-02-01
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| Series: | Tribology Online |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/trol/6/4/6_4_189/_pdf/-char/en |