A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature
Disease screening by exhaled breath diagnosis is less burdensome for patients, and various devices have been developed as promising diagnostic methods. We developed a microelectromechanical system (MEMS) optical interferometric surface stress sensor to detect volatile ethanol gas at room temperature...
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| Format: | Article |
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MDPI AG
2020-11-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/23/6868 |
| _version_ | 1827701025710014464 |
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| author | Toshiaki Takahashi Yong-Joon Choi Kazuaki Sawada Kazuhiro Takahashi |
| author_facet | Toshiaki Takahashi Yong-Joon Choi Kazuaki Sawada Kazuhiro Takahashi |
| author_sort | Toshiaki Takahashi |
| collection | DOAJ |
| description | Disease screening by exhaled breath diagnosis is less burdensome for patients, and various devices have been developed as promising diagnostic methods. We developed a microelectromechanical system (MEMS) optical interferometric surface stress sensor to detect volatile ethanol gas at room temperature (26~27 °C) with high sensitivity. A sub-micron air gap in the optical interferometric sensor reduces interference orders, leading to increased spectral response associated with nanomechanical deflection caused by ethanol adsorption. The sub-micron cavity was embedded in a substrate using a transfer technique of parylene-C nanosheet. The sensor with a 0.4 µm gap shows a linear stable reaction, with small standard deviations, even at low ethanol gas concentrations of 5–110 ppm and a reversible reaction to the gas concentration change. Furthermore, the possibility of detecting sub-ppm ethanol concentration by optimizing the diameter and thickness of the deformable membrane is suggested. Compared with conventional MEMS surface stress gas sensors, the proposed optical interferometric sensor demonstrated high-sensitivity gas detection with exceeding the detection limit by two orders of magnitude while reducing the sensing area. |
| first_indexed | 2024-03-10T14:25:00Z |
| format | Article |
| id | doaj.art-24c9f918a36344bdbff2b3054e3d8bed |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T14:25:00Z |
| publishDate | 2020-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-24c9f918a36344bdbff2b3054e3d8bed2023-11-20T23:04:07ZengMDPI AGSensors1424-82202020-11-012023686810.3390/s20236868A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room TemperatureToshiaki Takahashi0Yong-Joon Choi1Kazuaki Sawada2Kazuhiro Takahashi3Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, JapanDisease screening by exhaled breath diagnosis is less burdensome for patients, and various devices have been developed as promising diagnostic methods. We developed a microelectromechanical system (MEMS) optical interferometric surface stress sensor to detect volatile ethanol gas at room temperature (26~27 °C) with high sensitivity. A sub-micron air gap in the optical interferometric sensor reduces interference orders, leading to increased spectral response associated with nanomechanical deflection caused by ethanol adsorption. The sub-micron cavity was embedded in a substrate using a transfer technique of parylene-C nanosheet. The sensor with a 0.4 µm gap shows a linear stable reaction, with small standard deviations, even at low ethanol gas concentrations of 5–110 ppm and a reversible reaction to the gas concentration change. Furthermore, the possibility of detecting sub-ppm ethanol concentration by optimizing the diameter and thickness of the deformable membrane is suggested. Compared with conventional MEMS surface stress gas sensors, the proposed optical interferometric sensor demonstrated high-sensitivity gas detection with exceeding the detection limit by two orders of magnitude while reducing the sensing area.https://www.mdpi.com/1424-8220/20/23/6868fabry–perot interferencemicroelectromechanical systemssurface stress sensoroptical interferometryfilm transfer techniquevolatile organic compounds |
| spellingShingle | Toshiaki Takahashi Yong-Joon Choi Kazuaki Sawada Kazuhiro Takahashi A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature Sensors fabry–perot interference microelectromechanical systems surface stress sensor optical interferometry film transfer technique volatile organic compounds |
| title | A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature |
| title_full | A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature |
| title_fullStr | A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature |
| title_full_unstemmed | A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature |
| title_short | A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature |
| title_sort | ppm ethanol sensor based on fabry perot interferometric surface stress transducer at room temperature |
| topic | fabry–perot interference microelectromechanical systems surface stress sensor optical interferometry film transfer technique volatile organic compounds |
| url | https://www.mdpi.com/1424-8220/20/23/6868 |
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