Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas
| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2012-08-01
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| Series: | Open Physics |
| Subjects: | |
| Online Access: | https://doi.org/10.2478/s11534-012-0034-y |
| _version_ | 1819079538100928512 |
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| author | Tong Lizhu |
| author_facet | Tong Lizhu |
| author_sort | Tong Lizhu |
| collection | DOAJ |
| first_indexed | 2024-12-21T19:30:34Z |
| format | Article |
| id | doaj.art-24ce8951d5404ad782246628315fa4f7 |
| institution | Directory Open Access Journal |
| issn | 2391-5471 |
| language | English |
| last_indexed | 2024-12-21T19:30:34Z |
| publishDate | 2012-08-01 |
| publisher | De Gruyter |
| record_format | Article |
| series | Open Physics |
| spelling | doaj.art-24ce8951d5404ad782246628315fa4f72022-12-21T18:52:43ZengDe GruyterOpen Physics2391-54712012-08-0110488889710.2478/s11534-012-0034-yNumerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmasTong Lizhu0Keisoku Engineering System Co., Ltd., 1-9-5 Uchikanda, Chiyoda-ku, Tokyo, 101-0047, Japanhttps://doi.org/10.2478/s11534-012-0034-yicp plasmagas compositiongas flow ratecoupled calculation |
| spellingShingle | Tong Lizhu Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas Open Physics icp plasma gas composition gas flow rate coupled calculation |
| title | Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas |
| title_full | Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas |
| title_fullStr | Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas |
| title_full_unstemmed | Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas |
| title_short | Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas |
| title_sort | numerical study of the effect of gas flow in low pressure inductively coupled ar n2 plasmas |
| topic | icp plasma gas composition gas flow rate coupled calculation |
| url | https://doi.org/10.2478/s11534-012-0034-y |
| work_keys_str_mv | AT tonglizhu numericalstudyoftheeffectofgasflowinlowpressureinductivelycoupledarn2plasmas |