Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas

Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas

Bibliographic Details
Main Author:	Tong Lizhu
Format:	Article
Language:	English
Published:	De Gruyter 2012-08-01
Series:	Open Physics
Subjects:	icp plasma gas composition gas flow rate coupled calculation
Online Access:	https://doi.org/10.2478/s11534-012-0034-y

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