A Zinc Oxide Nanobeam Resonator for Ultrasensitivity Mass Detection

A Zinc Oxide Nanobeam Resonator for Ultrasensitivity Mass Detection

Abstract Nanomechanical resonators are expected to be exceptional sensors for high‐performance mass detection, mechanical sensing, and signal processing. In this paper, zinc oxide nanobeam resonators are produced based on single‐crystal ZnO nanowire, which has a typical diameter down to a few nanome...

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Bibliographic Details
Main Authors: Dazhi Wang, Pengfei Xu, Yichang Cui, Yu Zhang, Jianqiao He, Liangkun Lu, Yikang Li, Xiangji Chen, Chang Liu, Peiran Li, Yan Cui, Liujia Suo
Format: Article
Language:English
Published: Wiley-VCH 2023-07-01
Series:Advanced Electronic Materials
Subjects:
mass detection
NEMS
resonators
ultrasensitivity
zinc oxide nanowires
Online Access:https://doi.org/10.1002/aelm.202300079

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