Research on Sapphire Deep Cavity Corrosion and Mask Selection Technology
Aimed at the problem of the small wet etching depth in sapphire microstructure processing technology, a multilayer composite mask layer is proposed. The thickness of the mask layer is studied, combined with the corrosion rate of different materials on sapphire in the sapphire etching solution, diffe...
Main Authors: | Ying-Qi Shang, Hong-Quan Zhang, Yan Zhang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-01-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/2/136 |
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