All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications
In this work, an all-ceramic passive wireless inductor–capacitor (LC) resonator was presented for stable temperature sensing up to 1200 °C in air. Instead of using conventional metallic electrodes, the LC resonators are modeled and fabricated with thermally stable and highly electroconductive cerami...
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| Format: | Article |
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MDPI AG
2022-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/6/2165 |
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| author | Kavin Sivaneri Varadharajan Idhaiam Joshua A. Caswell Peter D. Pozo Katarzyna Sabolsky Konstantinos A. Sierros Daryl S. Reynolds Edward M. Sabolsky |
| author_facet | Kavin Sivaneri Varadharajan Idhaiam Joshua A. Caswell Peter D. Pozo Katarzyna Sabolsky Konstantinos A. Sierros Daryl S. Reynolds Edward M. Sabolsky |
| author_sort | Kavin Sivaneri Varadharajan Idhaiam |
| collection | DOAJ |
| description | In this work, an all-ceramic passive wireless inductor–capacitor (LC) resonator was presented for stable temperature sensing up to 1200 °C in air. Instead of using conventional metallic electrodes, the LC resonators are modeled and fabricated with thermally stable and highly electroconductive ceramic oxide. The LC resonator was modeled in ANSYS HFSS to operate in a low-frequency region (50 MHz) within 50 × 50 mm geometry using the actual material properties of the circuit elements. The LC resonator was composed of a parallel plate capacitor coupled with a planar inductor deposited on an Al<sub>2</sub>O<sub>3</sub> substrate using screen-printing, and the ceramic pattern was sintered at 1250 °C for 4 h in an ambient atmosphere. The sensitivity (average change in resonant frequency with respect to temperature) from 200–1200 °C was ~170 kHz/°C. The temperature-dependent electrical conductivity of the tin-doped indium oxide (ITO, 10% SnO<sub>2</sub> doping) on the quality factor showed an increase of <i>Q<sub>f</sub></i> from 36 to 43 between 200 °C and 1200 °C. The proposed ITO electrodes displayed improved sensitivity and quality factor at elevated temperatures, proving them to be an excellent candidate for temperature sensing in harsh environments. The microstructural analysis of the co-sintered LC resonator was performed using a scanning electron microscope (SEM) which showed that there are no cross-sectional and topographical defects after several thermal treatments. |
| first_indexed | 2024-03-09T12:41:37Z |
| format | Article |
| id | doaj.art-259a35d1f6a043e6908a6f9a82034b96 |
| institution | Directory Open Access Journal |
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| language | English |
| last_indexed | 2024-03-09T12:41:37Z |
| publishDate | 2022-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-259a35d1f6a043e6908a6f9a82034b962023-11-30T22:17:08ZengMDPI AGSensors1424-82202022-03-01226216510.3390/s22062165All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment ApplicationsKavin Sivaneri Varadharajan Idhaiam0Joshua A. Caswell1Peter D. Pozo2Katarzyna Sabolsky3Konstantinos A. Sierros4Daryl S. Reynolds5Edward M. Sabolsky6Department of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, WV 26506, USADepartment of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, WV 26506, USALane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, WV 26506, USADepartment of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, WV 26506, USADepartment of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, WV 26506, USALane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, WV 26506, USADepartment of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, WV 26506, USAIn this work, an all-ceramic passive wireless inductor–capacitor (LC) resonator was presented for stable temperature sensing up to 1200 °C in air. Instead of using conventional metallic electrodes, the LC resonators are modeled and fabricated with thermally stable and highly electroconductive ceramic oxide. The LC resonator was modeled in ANSYS HFSS to operate in a low-frequency region (50 MHz) within 50 × 50 mm geometry using the actual material properties of the circuit elements. The LC resonator was composed of a parallel plate capacitor coupled with a planar inductor deposited on an Al<sub>2</sub>O<sub>3</sub> substrate using screen-printing, and the ceramic pattern was sintered at 1250 °C for 4 h in an ambient atmosphere. The sensitivity (average change in resonant frequency with respect to temperature) from 200–1200 °C was ~170 kHz/°C. The temperature-dependent electrical conductivity of the tin-doped indium oxide (ITO, 10% SnO<sub>2</sub> doping) on the quality factor showed an increase of <i>Q<sub>f</sub></i> from 36 to 43 between 200 °C and 1200 °C. The proposed ITO electrodes displayed improved sensitivity and quality factor at elevated temperatures, proving them to be an excellent candidate for temperature sensing in harsh environments. The microstructural analysis of the co-sintered LC resonator was performed using a scanning electron microscope (SEM) which showed that there are no cross-sectional and topographical defects after several thermal treatments.https://www.mdpi.com/1424-8220/22/6/2165passive wireless sensorhigh temperature applicationLC resonatormetamaterialRFIDindium tin oxide |
| spellingShingle | Kavin Sivaneri Varadharajan Idhaiam Joshua A. Caswell Peter D. Pozo Katarzyna Sabolsky Konstantinos A. Sierros Daryl S. Reynolds Edward M. Sabolsky All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications Sensors passive wireless sensor high temperature application LC resonator metamaterial RFID indium tin oxide |
| title | All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications |
| title_full | All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications |
| title_fullStr | All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications |
| title_full_unstemmed | All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications |
| title_short | All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications |
| title_sort | all ceramic passive wireless temperature sensor realized by tin doped indium oxide ito electrodes for harsh environment applications |
| topic | passive wireless sensor high temperature application LC resonator metamaterial RFID indium tin oxide |
| url | https://www.mdpi.com/1424-8220/22/6/2165 |
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