Capacitive Angle Sensor Research Using COMSOL Multiphysics
This paper presents a method of simulating a capacitive sensor using COMSOL Multiphysics. A petal-form sensitive electrode structure applied to a capacitive angle sensor was simulated using COMSOL software; the angle was calculated using sines and cosines with capacitance value to fill in the simula...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-02-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/13/5/2937 |
| _version_ | 1797615771926396928 |
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| author | Jianwen Wu Zhen Meng Xingcheng Zhang Wei Mi Yuepeng Yan |
| author_facet | Jianwen Wu Zhen Meng Xingcheng Zhang Wei Mi Yuepeng Yan |
| author_sort | Jianwen Wu |
| collection | DOAJ |
| description | This paper presents a method of simulating a capacitive sensor using COMSOL Multiphysics. A petal-form sensitive electrode structure applied to a capacitive angle sensor was simulated using COMSOL software; the angle was calculated using sines and cosines with capacitance value to fill in the simulation of the capacitive angle sensor. First, according to the construction principle of the sensor structure, a GeoGebra graphing calculator with theoretical analysis and expression of function was used to obtain the two-dimensional structure of the target petal-form sensitive structure. Second, the holistic structural model was completed by importing it into COMSOL Multiphysics and setting the electrical and mechanical rotation parameters, which realized the simulation of the rotation process. Finally, because errors were found, the structure design was improved by introducing an angle between the partition domain, and the simulation errors were reduced. The resulting curves and calculated angles were consistent with the theory; the simulation results showed that the maximum angle difference value was 0.0175° and the minimum angle difference value was 0.0018° of a single cycle structure. |
| first_indexed | 2024-03-11T07:31:32Z |
| format | Article |
| id | doaj.art-26456ca9859e4452a2e62bb54bf41332 |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-11T07:31:32Z |
| publishDate | 2023-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-26456ca9859e4452a2e62bb54bf413322023-11-17T07:17:04ZengMDPI AGApplied Sciences2076-34172023-02-01135293710.3390/app13052937Capacitive Angle Sensor Research Using COMSOL MultiphysicsJianwen Wu0Zhen Meng1Xingcheng Zhang2Wei Mi3Yuepeng Yan4Smart Sensing Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaSmart Sensing Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaSmart Sensing Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaSchool of Integrated Circuit Science & Engineering, Tianjin Key Laboratory of Film Electronic & Communication Devices, Tianjin University of Technology, Tianjin 300384, ChinaCommunication Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaThis paper presents a method of simulating a capacitive sensor using COMSOL Multiphysics. A petal-form sensitive electrode structure applied to a capacitive angle sensor was simulated using COMSOL software; the angle was calculated using sines and cosines with capacitance value to fill in the simulation of the capacitive angle sensor. First, according to the construction principle of the sensor structure, a GeoGebra graphing calculator with theoretical analysis and expression of function was used to obtain the two-dimensional structure of the target petal-form sensitive structure. Second, the holistic structural model was completed by importing it into COMSOL Multiphysics and setting the electrical and mechanical rotation parameters, which realized the simulation of the rotation process. Finally, because errors were found, the structure design was improved by introducing an angle between the partition domain, and the simulation errors were reduced. The resulting curves and calculated angles were consistent with the theory; the simulation results showed that the maximum angle difference value was 0.0175° and the minimum angle difference value was 0.0018° of a single cycle structure.https://www.mdpi.com/2076-3417/13/5/2937capacitive angle sensorCOMSOLpetal-form sensitive electrodes |
| spellingShingle | Jianwen Wu Zhen Meng Xingcheng Zhang Wei Mi Yuepeng Yan Capacitive Angle Sensor Research Using COMSOL Multiphysics Applied Sciences capacitive angle sensor COMSOL petal-form sensitive electrodes |
| title | Capacitive Angle Sensor Research Using COMSOL Multiphysics |
| title_full | Capacitive Angle Sensor Research Using COMSOL Multiphysics |
| title_fullStr | Capacitive Angle Sensor Research Using COMSOL Multiphysics |
| title_full_unstemmed | Capacitive Angle Sensor Research Using COMSOL Multiphysics |
| title_short | Capacitive Angle Sensor Research Using COMSOL Multiphysics |
| title_sort | capacitive angle sensor research using comsol multiphysics |
| topic | capacitive angle sensor COMSOL petal-form sensitive electrodes |
| url | https://www.mdpi.com/2076-3417/13/5/2937 |
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