Highly Selective Tilted Triangular Springs with Constant Force Reaction
Guiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the reaction force and implements a consta...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-03-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/5/1677 |
| _version_ | 1827319295175032832 |
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| author | Lisa Schmitt Philip Schmitt Martin Hoffmann |
| author_facet | Lisa Schmitt Philip Schmitt Martin Hoffmann |
| author_sort | Lisa Schmitt |
| collection | DOAJ |
| description | Guiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the reaction force and implements a constant reaction force. We show the influence of the tilting angle on the reaction force, on the spring stiffness and spring selectivity. Furthermore, we investigate the influence of the different spring geometry parameters on the spring reaction force. We experimentally show tilted triangular springs exhibiting constant force reactions in a large deflection range and a comb-drive actuator guided by tilted triangular springs. |
| first_indexed | 2024-04-25T00:18:33Z |
| format | Article |
| id | doaj.art-2692aee13e594388b7c0148ab8da1e65 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-25T00:18:33Z |
| publishDate | 2024-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-2692aee13e594388b7c0148ab8da1e652024-03-12T16:55:36ZengMDPI AGSensors1424-82202024-03-01245167710.3390/s24051677Highly Selective Tilted Triangular Springs with Constant Force ReactionLisa Schmitt0Philip Schmitt1Martin Hoffmann2Microsystems Technology, Faculty of Electrical Engineering and Information Technology, Ruhr University Bochum, 44801 Bochum, GermanyMicrosystems Technology, Faculty of Electrical Engineering and Information Technology, Ruhr University Bochum, 44801 Bochum, GermanyMicrosystems Technology, Faculty of Electrical Engineering and Information Technology, Ruhr University Bochum, 44801 Bochum, GermanyGuiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the reaction force and implements a constant reaction force. We show the influence of the tilting angle on the reaction force, on the spring stiffness and spring selectivity. Furthermore, we investigate the influence of the different spring geometry parameters on the spring reaction force. We experimentally show tilted triangular springs exhibiting constant force reactions in a large deflection range and a comb-drive actuator guided by tilted triangular springs.https://www.mdpi.com/1424-8220/24/5/1677micromechanical springconstant force mechanismMEMSelectrostatic actuator |
| spellingShingle | Lisa Schmitt Philip Schmitt Martin Hoffmann Highly Selective Tilted Triangular Springs with Constant Force Reaction Sensors micromechanical spring constant force mechanism MEMS electrostatic actuator |
| title | Highly Selective Tilted Triangular Springs with Constant Force Reaction |
| title_full | Highly Selective Tilted Triangular Springs with Constant Force Reaction |
| title_fullStr | Highly Selective Tilted Triangular Springs with Constant Force Reaction |
| title_full_unstemmed | Highly Selective Tilted Triangular Springs with Constant Force Reaction |
| title_short | Highly Selective Tilted Triangular Springs with Constant Force Reaction |
| title_sort | highly selective tilted triangular springs with constant force reaction |
| topic | micromechanical spring constant force mechanism MEMS electrostatic actuator |
| url | https://www.mdpi.com/1424-8220/24/5/1677 |
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