Design and Optimization of a BAW Microphone Sensor
A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology. Acoustic measurement is an important part of wind tunnel experiments, and the microphone is the core device in an aerodynamic...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-06-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/6/893 |
| _version_ | 1797484316701229056 |
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| author | Huihui Guo Jianbo Li Tingting Liu Mingqiang Feng Yang Gao |
| author_facet | Huihui Guo Jianbo Li Tingting Liu Mingqiang Feng Yang Gao |
| author_sort | Huihui Guo |
| collection | DOAJ |
| description | A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology. Acoustic measurement is an important part of wind tunnel experiments, and the microphone is the core device in an aerodynamic acoustic measurement system. Aiming at the problem of low sound pressure (several Pa) and the small measuring surface of an experimental model in a wind tunnel experiment, a microphone sensor head with high sensitivity and small volume, based on film bulk acoustic resonator (FBAR), is presented and optimized in this work. The FBARs used as a transducer are located at the edge of a diaphragm for sound pressure level detection. A multi-scale and multi-physical field coupling analysis model of the microphone is established. To improve the performance of the microphone, the structural design parameters of the FBAR and the diaphragm are optimized by simulation. The research results show that the microphone has a small size, good sensitivity, and linearity. The sensor head size is less than 1 mm × 1 mm, the sensitivity is about 400 Hz/Pa when the sensor worked at the first-order resonance frequency, and the linearity is better than 1%. |
| first_indexed | 2024-03-09T23:01:44Z |
| format | Article |
| id | doaj.art-26fd406de72e4e21b300ccc33055cb99 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T23:01:44Z |
| publishDate | 2022-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-26fd406de72e4e21b300ccc33055cb992023-11-23T18:01:08ZengMDPI AGMicromachines2072-666X2022-06-0113689310.3390/mi13060893Design and Optimization of a BAW Microphone SensorHuihui Guo0Jianbo Li1Tingting Liu2Mingqiang Feng3Yang Gao4School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaSchool of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaSchool of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaSchool of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaSchool of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, ChinaA wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology. Acoustic measurement is an important part of wind tunnel experiments, and the microphone is the core device in an aerodynamic acoustic measurement system. Aiming at the problem of low sound pressure (several Pa) and the small measuring surface of an experimental model in a wind tunnel experiment, a microphone sensor head with high sensitivity and small volume, based on film bulk acoustic resonator (FBAR), is presented and optimized in this work. The FBARs used as a transducer are located at the edge of a diaphragm for sound pressure level detection. A multi-scale and multi-physical field coupling analysis model of the microphone is established. To improve the performance of the microphone, the structural design parameters of the FBAR and the diaphragm are optimized by simulation. The research results show that the microphone has a small size, good sensitivity, and linearity. The sensor head size is less than 1 mm × 1 mm, the sensitivity is about 400 Hz/Pa when the sensor worked at the first-order resonance frequency, and the linearity is better than 1%.https://www.mdpi.com/2072-666X/13/6/893microphonefilm bulk acoustic resonatordiaphragmacoustic measurement |
| spellingShingle | Huihui Guo Jianbo Li Tingting Liu Mingqiang Feng Yang Gao Design and Optimization of a BAW Microphone Sensor Micromachines microphone film bulk acoustic resonator diaphragm acoustic measurement |
| title | Design and Optimization of a BAW Microphone Sensor |
| title_full | Design and Optimization of a BAW Microphone Sensor |
| title_fullStr | Design and Optimization of a BAW Microphone Sensor |
| title_full_unstemmed | Design and Optimization of a BAW Microphone Sensor |
| title_short | Design and Optimization of a BAW Microphone Sensor |
| title_sort | design and optimization of a baw microphone sensor |
| topic | microphone film bulk acoustic resonator diaphragm acoustic measurement |
| url | https://www.mdpi.com/2072-666X/13/6/893 |
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